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TSC87251G2D Datasheet(PDF) 9 Page - TEMIC Semiconductors

Part # TSC87251G2D
Description  0.5 Um SCMOS3 Technology
Download  28 Pages
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Manufacturer  TEMIC [TEMIC Semiconductors]
Direct Link  http://www.temic.de
Logo TEMIC - TEMIC Semiconductors

TSC87251G2D Datasheet(HTML) 9 Page - TEMIC Semiconductors

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Qualpack TSC87251G2D
Rev. 0 – October 1999
9
2.6 Wafer Process Control
All the inspections and controls are defined as a process step in the production management software,
and are led by using a centralized SPC software. PC system could be summarized as follows:
Probe
die-sort
Assembly
- NANTES:
hermetic packages
- Subcontractors :
plastic packages
Final Test
Process
parameters
Electrical
Test
Engineering Database
Physical
SPC (xbar / R)
Cpk tracking
Electrical
SPC (xbar / s)
Cpk tracking
Attribute
Physical measurement
SPC (xbar / R)
Cpk tracking
Attribute
Measurement
- NANTES :
hermetic packages
- Subcontractors :
plastic packages
Wafer Fab
Critical process parameters are identified by using F.M.E.A. and other advanced tools.
Those parameters are followed in real time with the SPC methodology and their capability is measured
and monthly reported in the Operation Review.
For end 1999, the Cpk target is the following:
% of all parameters per Cpk categories
0%
20%
40%
60%
80%
100%
1995
1996
1997
1998
Obj. 99
>1.67
<1.67


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