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SFM5300 Datasheet(PDF) 8 Page - List of Unclassifed Manufacturers |
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SFM5300 Datasheet(HTML) 8 Page - List of Unclassifed Manufacturers |
8 / 10 page www.sensirion.com October 2016 – V1 8/10 5 Supported flow units Typical flow unit Reference condition Gas Temperature Gas Pressure mln/min (norm milliliter per minute) 0 °C / 32° F 1013 mbar / 14.69 psi ln/min (norm liter per minute) sccm (standard cubic centimeter per minute) 20 °C / 68° F slm (standard liter per minute) Example: Relationship for N2 between: ln/min (0°C, 1013 mbar) and slm (20°C / 68°F, 1013 mbar / 14.69) 1 ln/min = 1.073 slm 10 ln/min = 10.73 slm 6 Revision history Date Version Page(s) Changes September 2016 V1 All Table 6: Units for gas flow rates |
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