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SFC5400 Datasheet(PDF) 9 Page - List of Unclassifed Manufacturers |
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SFC5400 Datasheet(HTML) 9 Page - List of Unclassifed Manufacturers |
9 / 12 page CMOSens SFC5400 / SFM5400 Mass Flow Controller / Meter for Gases www.sensirion.com October 2016 – V12 9/12 Parameter Value Units Mechanical Weight (without fittings) 215 g Weight (down mount) 280 g Weight (VCR / VCO) 280 g 5 Supported flow units Typical flow unit Reference condition Gas Temperature Gas Pressure mln/min (norm milliliter per minute) 0 °C / 32° F 1013 mbar / 14.69 psi ln/min (norm liter per minute) sccm (standard cubic centimeter per minute) 20 °C / 68° F slm (standard liter per minute) Example: Relationship for N2 between: ln/min (0°C, 1013 mbar) and slm (20°C / 68°F, 1013 mbar / 14.69) 1 ln/min = 1.073 slm 10 ln/min = 10.73 slm Figure 13: Physical dimensions and mounting information for the downmount version. All units are in [mm]. Table 6: Weight Table 7: Units for gas flow rates |
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