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SFC5400 Datasheet(PDF) 9 Page - List of Unclassifed Manufacturers

Part # SFC5400
Description  Ultra-fast settling time (down to 50 ms)
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Manufacturer  ETC2 [List of Unclassifed Manufacturers]
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SFC5400 Datasheet(HTML) 9 Page - List of Unclassifed Manufacturers

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CMOSensSFC5400 / SFM5400 Mass Flow Controller / Meter for Gases
www.sensirion.com
October 2016 – V12
9/12
Parameter
Value
Units
Mechanical
Weight (without fittings)
215
g
Weight (down mount)
280
g
Weight (VCR / VCO)
280
g
5 Supported flow units
Typical flow unit
Reference condition
Gas Temperature
Gas Pressure
mln/min
(norm milliliter per minute)
0 °C / 32° F
1013 mbar / 14.69 psi
ln/min
(norm liter per minute)
sccm
(standard cubic centimeter per minute)
20 °C / 68° F
slm
(standard liter per minute)
Example: Relationship for N2 between:
ln/min (0°C, 1013 mbar)
and
slm (20°C / 68°F, 1013 mbar / 14.69)
1 ln/min
=
1.073 slm
10 ln/min
=
10.73 slm
Figure 13: Physical dimensions and mounting information for the downmount version. All units are in [mm].
Table 6: Weight
Table 7: Units for gas flow rates


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