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TSS461 Datasheet(PDF) 4 Page - TEMIC Semiconductors

Part No. TSS461
Description  Van Controller Serial Interface
Download  24 Pages
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Maker  TEMIC [TEMIC Semiconductors]
Homepage  http://www.temic.de
Logo TEMIC - TEMIC Semiconductors

TSS461 Datasheet(HTML) 4 Page - TEMIC Semiconductors

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Qualpack TS80C31X2/C32X2
4
Rev. 2 – January 1999
3. Technology Information
3.1 Wafer Process Technology
Process type (Name):
CMOS (SCMOS1/2 - Z86E)
Base material:
Silicon Epi substrate type
Wafer Thickness (final)
475um
Wafer diameter
150mm
Number of masks
13
Gate oxide
Material
Silicon dioxide
Thickness
195 A
Polysilicon
Number of layers
1
Thickness
3000 A
Metal
Number of layers
2
Layer 1 material
TiN/W
Layer 1 thickness
600 + 5000 A
Layer 2 material
Ti/AlCu
Layer 2 thickness
7000 A
Passivation
Material
Si3N4 on SiO2
Thickness
10000 A


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