05 | Keysight | 4082A Parametric Test System - Data Sheet

Switching matrix subsystem

Maximum DUT pins

48 output pins plus one pin for the prober chuck connection (triaxial connector).

Two types of DC switching matrix cards are available: standard low-current and

ultra-low current.

Maximum number of instrument ports

SMU port in test head

Eight SMUs + one GNDU

- Two ports for low-current measurement (Non-Kelvin)

- Four ports (Kelvin)

- Two ports (Non-Kelvin)

- One port for GNDU (Kelvin)

Auxiliary ports

Six for external instruments (Digital voltmeter, etc.) and two for HS-CMU or

E4980A

- Two triaxial input ports (Force/guard/common, AUX ports 1 and 2)

- Four BNC two-pair input ports (Force/common and sense/common,

AUX ports 3 to 6)

- Two BNC input ports (Force/common, AUX ports 7 and 8, connected to

HSCMU in default)

Extended path:

48 extended paths

The system provides one on/off relay for each path.

Maximum voltage at each port

SMU port in test head

±200 V

AUX port

±200 V (AUX ports 1 and 2)

±100 V (AUX ports 3 to 8)

Optional HF ports

±100 V (between force and common of each HF port)

±100 V (between two of forces of all HF ports)

±100 V (between any force of HF ports and any force of extended paths)

Extended path

±100 V (between force and common of each extended path)

±100 V (between any force of the optional HF ports and any force of extended paths)

Zero reference

±200 mV

Maximum current, port to DUT pin

SMU port in test head

±1.0 A

GNDU

±1.6 A

AUX port

±1.0 A

Optional HF ports

±0.5 A

Extended path

±0.5 A

Maximum residual resistance

Through AUX port

Low current port: Force 1.0 Ω

Kelvin port: Force 1.0 Ω, Sense 2.5 Ω

Non-Kelvin port: Force 1.0 Ω

Maximum stray capacitance between

DUT pins

3 pF (supplemental characteristics)

Isolation resistance

Ω (supplemental characteristics)

Switching matrix subsystem