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82350B Datasheet(PDF) 8 Page - Agilent(Hewlett-Packard)

Part # 82350B
Description  Agilent B1500A Semiconductor Device Analyzer
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Manufacturer  HP [Agilent(Hewlett-Packard)]
Direct Link  http://www.home.agilent.com
Logo HP - Agilent(Hewlett-Packard)

82350B Datasheet(HTML) 8 Page - Agilent(Hewlett-Packard)

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7
Output terminal/connection
Dual triaxial connector, Kelvin (remote
sensing)
Voltage/current compliance
(limiting)
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage:
0 V to ±100 V (MPSMU, HRSMU)
0 V to ±200 V (HPSMU)
Current:
±10 fA to ±100 mA (HRSMU with ASU)
±100 fA to ±100 mA (HRSMU)
±1 pA to ±100 mA (MPSMU)
±1 pA to ±1 A (HPSMU)
Compliance accuracy:
Same as the current or voltage set
accuracy.
About measurement accuracy
RF electromagnetic field and SMU
measurement accuracy:
SMU voltage and current measure-
ment accuracy can be affected by RF
electromagnetic field strengths greater
than 3 V/m in the frequency range of
80 MHz to 1 GHz. The extent of this
effect depends upon how the instrument
is positioned and shielded.
Induced RF field noise and SMU
measurement accuracy:
SMU voltage and current measurement
accuracy can be affected by induced RF
field noise strengths greater than 3 V
rms
in the frequency range of 150 kHz to
80 MHz. The extent of this effect
depends upon how the instrument is
positioned and shielded.
Pulse measurement
Pulse width: 500 µsec to 2 s
Pulse period: 5 ms to 5 s
Period ≥ width + 2 ms
(when width ≤ 100 ms)
Period ≥ width + 10 ms
(when width > 100 ms)
Pulse resolution: 100 µs
SMU pulse setting accuracy
(fixed measurement range,
supplemental information):
Width: 0.5 % + 50 µs
Period: 0.5 % + 100 µs
Supplemental information
Maximum allowable cable resistance
(Kelvin connection):
Sense: 10 Ω
Force: 10 Ω (≤ 100 mA), 1.5 Ω (>100 mA)
Voltage source output resistance:
(Force line, Non-Kelvin connection)
0.2 Ω (HPSMU)
0.3 Ω (MPSMU, HRSMU)
Voltage measurement input resistance:
≥ 1013
Current source output resistance:
≥ 1013 Ω (1 nA range)
Current compliance setting accuracy
(for opposite polarity):
For 1 pA to 10 nA ranges:
I setting accuracy ±12 % of range
For 100 nA to 1 A ranges:
I setting accuracy ±2.5 % of range
Maximum capacitive load:
1 pA to 10 nA ranges: 1000 pF
100 nA to 10 mA ranges: 10 nF
100 mA and 1 A ranges: 100 µF
Maximum guard capacitance:
900 pF (HPSMU, MPSMU, HRSMU)
660 pF (HRSMU with ASU)
Maximum shield capacitance:
5000 pF (HPSMU, MPSMU, HRSMU)
3500 pF (HRSMU with ASU)
Maximum guard offset voltage:
±1 mV (HPSMU)
±3 mV (MPSMU, HRSMU)
±4.2 mV (HRSMU with ASU, Iout≤100 µA)
Noise characteristics (filter ON):
Voltage source: 0.01 % of V range (rms.)
Current source: 0.1 % of I range (rms.)
Overshoot (typical, filter ON):
Voltage source: 0.03 % of V range
Current source: 1 % of I range
Range switching transient noise (filter ON):
Voltage ranging: 250 mV
Current ranging: 70 mV
Slew rate: 0.2 V/µs (maximum)
Voltage range, resolution, and
accuracy (high speed ADC)
Voltage
range
Measure
resolution
Measure
accuracy¹, ²
±0.5 V³
25 µV
±(0.01 % + 250 µV)
±2 V
100 µV
±(0.01 % + 700 µV)
±5 V³
250 µV
±(0.01 % + 2 mV)
±20 V
1 mV
±(0.01 % + 4 mV)
±40 V
2 mV
±(0.015 % + 8 mV)
±100 V
5 mV
±(0.02 % + 20 mV)
±200 V4
10 mV
±(0.035 % + 40 mV)
1. ± (% of read value + offset voltage V)
2. Averaging is 128 samples in 1 PLC.
3. Only for MPSMU and HRSMU.
4. Only for HPSMU.
Current range, resolution, and
accuracy (high speed ADC)
Current
range
Measure
resolution¹, ²
Measure accuracy3
±1 pA4
100 aA
±(1.8 %+12 fA)
±10 pA5
1 fA
±(0.5 %+15 fA+10 aA x Vo)
±100 pA5
5 fA
±(0.3 %+30 fA+100 aA x Vo)
±1 nA
50 fA
±(0.1 %+300 fA+1 fA x Vo)
±10 nA
500 fA
±(0.1 %+2 pA+10 fA x Vo)
±100 nA
5 pA
±(0.05 %+20 pA+100 fA x Vo)
±1 µA
50 pA
±(0.05 %+200 pA+1 pA x Vo)
±10 µA
500 pA
±(0.04 %+2 nA+10 pA x Vo)
±100 µA
5 nA
±(0.03 %+20 nA+100 pA x Vo)
±1 mA
50 nA
±(0.03 %+200 nA+1 nA x Vo)
±10 mA
500 nA
±(0.03 %+2 µA+10 nA x Vo)
±100 mA
5 µA
±(0.04 %+20 µA+100 nA x Vo)
±1 A6
50 µA
±(0.4 %+300 µA+1 µA x Vo)
1. Specified measurement resolution is limited by
fundamental noise limits. Minimum displayed
resolution is 1 aA at 1 pA range by 6 digits.
2. Measurements made in the lower ranges can
be greatly impacted by vibrations and shocks.
These specifications assume an environment
free of these factors.
3. ± (% of read value + offset current
(fixed part determined by the output/
measurement range + proportional part
that is multiplied by Vo)
4. 1 pA range is for HRSMU with ASU.
5. 10 pA range and 100 pA range is for HRSMU
with or without ASU.
6. Only for HPSMU.


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