www.sensirion.com

Version 4 – September 2015

1/7

SLG Liquid Flow Meter Series

Ultra High Pressure Flow Sensor for LC Applications



Ultra-low Flow Sensing in the Sub-µl/min Range



Operating Pressure up to 1200 bar (17500 psi)



40 ms Response Time

Product Summary

Interface Options

The SLG Liquid Flow Meter enables precise, bi-

directional measurements of dynamic liquid flow rates

in the nl/min to low µl/min range. This device has been

designed for ultra-high pressure applications in Liquid

Chromatography Systems (UHPLC). Excellent bio-

compatibility and chemical resistance is ensured by the

use of fused silica, stainless steel and PEEK for all

wetted parts.

Digital

- I2C-Bus

- RS485-Bus

- USB Cable

Analog

- Voltage Output (0-10 V)

- Additional operation

modes

For more information on communication, please refer

to page 2 of this document.

1 Sensing Performance

Parameter

SLG-0025

SLG-0075

SLG-0150

Unit

Precision

Extended

1500

5000

20000

8000

nl/min

1700

5500

10500

nl/min

Accuracy below full scale

(whichever error is larger)

10

10

20

5

0.5

0.5

n/a

0.5

% of full scale

Repeatability below full scale

(whichever error is larger)

0.6

0.6

1.2

0.5

% of m.v.

0.06

0.03

n/a

0.05

% of full scale

Temperature coefficient

(additional error / °C; whichever is larger)

0.3

0.3

0.3

0.15

% m.v. / °C

0.03

0.03

n/a

0.015

% full scale / °C

-

-

-

<0.4

% of full scale

Flow detection response time

40

40

120

40

ms

Response time on power-up

120

ms

Operating temperature

+10…+50

°C

-10…+60

°C

Operating pressure

1200 (17500)

500 (7250)

Bar (psi)

a

Flow rate at which the sensor output saturates. See Section 2 for performance between full scale and saturation point

b

Lower/upper limit

c

Measured value

d

No dependence on the mounting orientation for SLG-0025 and SLG-0075. SLG-0150: maximum additional offset when mounted vertically.

e

Non-condensing, flow path empty