MEMS Airflow Sensor

D6F-10A, -20A, -50A

23

MEMS Airflow Sensor

D6F-10A, -20A, -50A

Compact, intelligent sensor featuring

MEMS technology for precision mass

airflow measurement

• Precision mass airflow up to 50 LPM

• Stable output across full scale

• Manifold mounting feature with NBR ‘O’ ring option

• Compact size 78 (L) x 30 (W) x 30 (H) mm

• Low power consumption

• RoHS Compliant

Ordering Information

Note: Cable Assembly is sold separately.

* Contact Omron for other gases or thread types.

**Mass flow converted to volumetric flow (standard liters per minute) at 0

°C and 1 atm.

■ Application Examples

• Industrial processes

• Medical Respirators and Ventilators

• MiG and TiG welding systems

• Anesthesia Delivery

• Mass flow controllers

• Scientific / test equipment

• Fuel cell controls

Rating

■ Absolute maximum rating

■ Electrical Performance

Description

Case

Applicable Gas

Flow Range**

Connection Type

Model

Mass Flow Sensor

Thermoplastic resin

/ Aluminum alloy

Air*

0 – 10 LPM

Right-angle manifold

mount connection

D6F-10A5-000

0 – 20 LPM

D6F-20A5-000

0 – 50 LPM

D6F-50A5-000

0 – 10 LPM

Straight RC1/4 (1/4” BSPT)

threaded pipe*

D6F-10A6-000

0 – 20 LPM

D6F-20A6-000

0 – 50 LPM

D6F-50A6-000

Cable Connector Assembly

- - -

- - -

- - -

- - -

D6F-CABLE1

Item

Symbol

Ratings

Unit

Power supply

V

CC

26.4

VDC

Output voltage

V

OUT

6VDC

Item

Term

Condition

MIN

MAX

Unit

Power supply

V

CC

—

10.8

26.4

VDC

Operating temperature

T

OPR

No condensation or icing

-10

60

°C

Output voltage (max.)

V

OH

V

5

5.7

VDC

Output voltage (min.)

V

OL

V

0

1

VDC