MEMS Airflow Sensor

D6F-10A, -20A, -50A

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MEMS Airflow Sensor

D6F-10A, -20A, -50A

Compact, intelligent sensor featuring

MEMS technology for precision mass

airflow measurement

• Precision mass airflow up to 50 slpm

• Stable output across full scale

• Horizontal mounting feature with *NBR ‘O’ ring option

• Compact size 78 (L) x 30 (W) x 30 (H) mm

• Low power consumption

* NBR material recommended for all applications including

medical and food processing

Application Examples

• Industrial processes

• Medical Respirators and Ventilators

• MiG and TiG welding systems

• Anesthesia Delivery

• Mass flow controllers

• Scientific / test equipment

• Fuel cell controls

Ordering Information

■ Rating

Absolute maximum rating

Model

Case

Applicable Gas

Flow Range

Notes

D6F-10A5

Thermoplastic resin / Aluminum alloy

Air, N

0 – 10 LPM

Built-in orifice, Right-angle Connect

D6F-20A5

Thermoplastic resin / Aluminum alloy

Air, N

0 – 20 LPM

Built-in orifice, Right-angle Connect

D6F-50A5

Thermoplastic resin / Aluminum alloy

Air, N

0 – 50 LPM

Built-in orifice, Right-angle Connect

D6F-10A6

Thermoplastic resin / Aluminum alloy

Air, N

0 – 10 LPM

Built-in orifice, Straight Connect

D6F-20A6

Thermoplastic resin / Aluminum alloy

Air, N

0 – 20 LPM

Built-in orifice, Straight Connect

D6F-50A6

Thermoplastic resin / Aluminum alloy

Air, N

0 – 50 LPM

Built-in orifice, Straight Connect

D6F-Cable1

Optional (recommended)

Item

Term

Ratings

Unit

Power-supply voltage

V

CC

26.4

VDC

Output voltage

V

OUT

6VDC