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MP3H6115A Datasheet(PDF) 4 Page - Freescale Semiconductor, Inc

Part No. MP3H6115A
Description  High Temperature Accuracy Integrated Silicon Pressure Sensor for Measuring Absolute Pressure, On-Chip Signal Conditioned
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Maker  FREESCALE [Freescale Semiconductor, Inc]
Homepage  http://www.freescale.com
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MP3H6115A Datasheet(HTML) 4 Page - Freescale Semiconductor, Inc

 
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Sensors
4
Freescale Semiconductor
MP3H6115A
Figure 2. Cross Sectional Diagram SSOP (not to scale)
Figure 2 illustrates the absolute sensing chip in the basic
Super Small Outline chip carrier (Case 1317).
Figure 3. Typical Application Circuit
(Output Source Current Operation)
Figure 3 shows a typical application circuit (output source
current operation).
Figure 4. Output versus Pressure Differential
Figure 4 shows the sensor output signal relative to
pressure input. Typical minimum and maximum output
curves are shown for operation over 0 to 85
°C temperature
range. The output will saturate outside of the rated pressure
range.
A fluorosilicone gel isolates the die surface and wire bonds
from the environment, while allowing the pressure signal to
be transmitted to the silicon diaphragm. The MP3H6115A
series pressure sensor operating characteristics, internal
reliability and qualification tests are based on use of dry air as
the pressure media. Media other than dry air may have
adverse effects on sensor performance and long-term
reliability. Contact the factory for information regarding media
compatibility in your application.
Wire Bond
Stainless Steel
Cap
Thermoplastic
Case
Die Bond
Sealed Vacuum Reference
Fluoro Silicone
Gel Die Coat
Leadframe
Absolute Elelment
P1
Die
VS Pin 2
+3 V
GND Pin 3
VOUT Pin 4
MP3H6115A
to
100 nF
51 K
47 pF
GND
Pressure (Reference to Sealed Vacuum) in kPa
Min
Typ
Max
Transfer Function:
VOUT = VS x (.009xP–.095) ± Error
VS = 3.0 VDC
Temp = 0 to 85°C
3.0
2.75
2.5
2.25
2.0
1.75
1.5
1.25
1.0
0.75
0.5
0.25
0


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