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MPMZ2202 Datasheet(PDF) 4 Page - Freescale Semiconductor, Inc

Part No. MPMZ2202
Description  200 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors
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Maker  FREESCALE [Freescale Semiconductor, Inc]
Homepage  http://www.freescale.com
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MPMZ2202 Datasheet(HTML) 4 Page - Freescale Semiconductor, Inc

   
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MPMZ2202
Sensors
4
Freescale Semiconductor
LINEARITY
Linearity refers to how well a transducer's output follows
the equation: VOUT = VOFF + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or
(2) a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. The
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
Operating characteristics, internal reliability and
qualification tests are based on use of dry clean air
as the pressure media. Media other than dry clean
air may have adverse ef fect s on se nsor
performance and long term reliability. Contact the
factory for information regarding media compatibility
in your application.
Figure 2. Linearity Specification Comparison
ON-CHIP TEMPERATURE COMPENSATION AND
CALIBRATION
Figure 3 shows the minimum, maximum and typical output
characteristics of the MPMZ2202 series at 25
°C. The output
is directly proportional to the differential pressure and is es-
sentially a straight line.
A gel isolates the die surface and wire bonds from the en-
vironment, while allowing the pressure signal to be transmit-
ted to the silicon diaphragm.
Figure 3. Output versus Pressure Differential
Pressure(% Fullscale)
050
100
End Point Straight Line Fit
Exaggerated
Performance
Curve
Least Squares Fit
Least
Square
Deviation
Straight Line
Deviation
Offset
Least
Square
Deviation
kPa
PSI
40
35
30
25
15
10
5
0
-5
050
7.25
100
14.5
150
21.75
200
29
20
MAX
TYP
MIN
Offset
(TYP)
Span
Range
(TYP)
25
75
125
175
VS = 10 Vdc
TA = 25°C


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