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4210-SMU Datasheet(PDF) 1 Page - TEKTRONIX, INC. |
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4210-SMU Datasheet(HTML) 1 Page - TEKTRONIX, INC. |
1 / 45 page See your innovations come to life. The 4200A-SCS is a customizable and fully-integrated parameter analyzer that provides synchronized insight into current-voltage (I-V), capacitance-voltage (C-V), and ultra-fast pulsed I-V characterization. The highest performance parameter analyzer, the 4200A-SCS accelerates semiconductor, materials, and process development. The 4200A-SCS ClariusTM GUI-based Software provides clear, uncompromised measurement and analysis capability. Furnished with embedded measurement expertise and hundreds of ready-to-use application tests, Clarius Software enables you to dig deeper into your research with speed and confidence. The 4200A-SCS Parameter Analyzer is completely customizable and fully upgradable, so you can add the instruments you need now – or later. With the 4200A-SCS Parameter Analyzer, making connections to your bold discoveries has never been easier. Key Performance Specifications I-V Source Measure Unit (SMU) • ±210 V/100 mA or ±210 V/1 A modules • 100 fA measure resolution • 10 aA measure resolution with optional preamp • 10 mHz – 10 Hz very low frequency capacitance measurements • 100 µF load capacitance • 4-quadrant operation • 2 or 4-wire connections C-V Multi-frequency Capacitance Unit (CVU) • AC impedance measurements (C-V, C-f, C-t) • 1 kHz – 10 MHz frequency range • ±30 V (60 V differential) built-in DC bias, expandable to ±210 V (420 V differential) • Simple switching between I-V and C-V measurements with the optional CVIV Multi-Switch Pulsed I-V Ultra-fast Pulse Measure Unit (PMU) • Two independent or synchronized channels of high-speed pulsed I-V source and measure • 200 MS/s, 5 ns sampling rate • ±40 V (80 V p-p ), ±800 mA • Transient waveform capture mode • Arbitrary waveform generator for multi-level pulse waveform with 10 ns programmable resolution High Voltage Pulse Generator Unit (PGU) • Two channels of high-speed pulsed V source • ±40 V (80 V p-p ), ±800 mA • Arbitrary waveform generator Segment ARB® mode for multi-level pulse waveform with 10 ns programmable resolution I-V/C-V Multi-Switch Module (CVIV) • Easily switch between I-V and C-V measurements without re-cabling or lifting prober needles • Move the C-V measurement to any terminal without re-cabling or lifting prober needles • ±210 V DC bias capable Remote Preamplifier/Switch Module (RPM) • Automatically switches between I-V, C-V, and ultra-fast pulsed I-V measurements • Extends current sensitivity of the 4225-PMU to tens of picoamps • Reduces cable capacitance effects 4200A-SCS Parameter Analyzer Datasheet WINDOWS 10 |
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