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4210-SMU Datasheet(PDF) 1 Page - TEKTRONIX, INC.

Part # 4210-SMU
Description  4200A-SCS Parameter Analyzer
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Manufacturer  TEKTRONIX [TEKTRONIX, INC.]
Direct Link  https://www.tek.com/
Logo TEKTRONIX - TEKTRONIX, INC.

4210-SMU Datasheet(HTML) 1 Page - TEKTRONIX, INC.

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See your innovations come to life. The 4200A-SCS is a
customizable and fully-integrated parameter analyzer
that provides synchronized insight into current-voltage
(I-V), capacitance-voltage (C-V), and ultra-fast pulsed I-V
characterization. The highest performance parameter
analyzer, the 4200A-SCS accelerates semiconductor,
materials, and process development.
The 4200A-SCS ClariusTM GUI-based Software provides
clear, uncompromised measurement and analysis
capability. Furnished with embedded measurement
expertise and hundreds of ready-to-use application
tests, Clarius Software enables you to dig deeper into
your research with speed and confidence.
The 4200A-SCS Parameter Analyzer is completely
customizable and fully upgradable, so you can add the
instruments you need now – or later. With the 4200A-SCS
Parameter Analyzer, making connections to your bold
discoveries has never been easier.
Key Performance Specifications
I-V Source Measure Unit (SMU)
• ±210 V/100 mA or ±210 V/1 A modules
• 100 fA measure resolution
• 10 aA measure resolution with optional preamp
• 10 mHz – 10 Hz very low frequency capacitance
measurements
• 100 µF load capacitance
• 4-quadrant operation
• 2 or 4-wire connections
C-V Multi-frequency Capacitance Unit (CVU)
• AC impedance measurements (C-V, C-f, C-t)
• 1 kHz – 10 MHz frequency range
• ±30 V (60 V differential) built-in DC bias, expandable
to ±210 V (420 V differential)
• Simple switching between I-V and C-V
measurements with the optional CVIV Multi-Switch
Pulsed I-V Ultra-fast Pulse Measure Unit (PMU)
• Two independent or synchronized channels of
high-speed pulsed I-V source and measure
• 200 MS/s, 5 ns sampling rate
• ±40 V (80 V
p-p ), ±800 mA
• Transient waveform capture mode
• Arbitrary waveform generator for multi-level pulse
waveform with 10 ns programmable resolution
High Voltage Pulse Generator Unit (PGU)
• Two channels of high-speed pulsed V source
• ±40 V (80 V
p-p ), ±800 mA
• Arbitrary waveform generator Segment ARB®
mode for multi-level pulse waveform with 10 ns
programmable resolution
I-V/C-V Multi-Switch Module (CVIV)
• Easily switch between I-V and C-V measurements
without re-cabling or lifting prober needles
• Move the C-V measurement to any terminal without
re-cabling or lifting prober needles
• ±210 V DC bias capable
Remote Preamplifier/Switch Module (RPM)
• Automatically switches between I-V, C-V, and
ultra-fast pulsed I-V measurements
• Extends current sensitivity of the 4225-PMU
to tens of picoamps
• Reduces cable capacitance effects
4200A-SCS Parameter Analyzer
Datasheet
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