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100005788 Datasheet(PDF) 2 Page - MKS Instruments.

Part No. 100005788
Description  ISO-Universal fittings Sizes NW 63 to NW 630
Download  20 Pages
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

100005788 Datasheet(HTML) 2 Page - MKS Instruments.

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Series 76 ISO-Universal components are a vacuum
flanging system for 63 mm to 1000 mm fittings. The
dimension criteria are based on requirements established
by the International Standards Organization (ISO). There
are two flange styles in the ISO-Universal system: Multi-
Fastener (MF) and Bolted. The flange family is also
called: ISO-MF, ISO-PF or ISO-K. Figure 1 illustrates the
components of this flange system.
This catalog features a large variety of components such
as elbows, tees, crosses, reducers and adapters having
ISO-MF flanges. Currently there is no ISO standard for
the flange face to centerline distance in this system. There
is however, an industry standard followed by several
manufacturers. MKS Instruments follows these standards
in designing the Series 76 ISO-Universal components.
There are several advantages in the use of ISO
components. One advantage is that the flange is
“sexless.” The seal is on a symmetrical centering ring
that interfaces with two identical flanges. In addition, ISO-
Universal flanges are more compact than ASA flanges,
which were designed for pressure and are unnecessarily
massive for vacuum use. Since these flanges are an ISO
standard, they can be used with components from other
Figure 1 —
Component Nomenclature for the ISO Universal Flange System
The Series 76 ISO-Universal component system is used
in a variety of industries from process manufacturing to
semiconductor fabrication to thin film deposition. Some
uses in vacuum systems are:
1. Roughing and foreline plumbing for large vacuum
2. High vacuum, high conductance, interconnections
3. Modular systems which will be modified frequently
4. Experimental systems in research laboratories
ISO-Universal flange components using elastomer seals
are primarily designed for use at subatmospheric pressure.
When elastomer seals are used without baking, typical
limiting pressures may be around 10-6 Torr. Baked systems
using Viton can be used to 10-8 Torr.
Standard components can be used to a slight over
pressure. MF flanges may be used at a maximum pressure
of 30 psig if the metal spacer ring is used and the flange
clamps are firmly retained.

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