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100003048 Datasheet(PDF) 3 Page - MKS Instruments.

Part No. 100003048
Description  CF Component Ultra high vacuum fittings
Download  20 Pages
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Maker  MKS [MKS Instruments.]
Homepage  https://www.mksinst.com/
Logo MKS - MKS Instruments.

100003048 Datasheet(HTML) 3 Page - MKS Instruments.

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Series 88 Components
Gasket
Non-rotatable
Flange
Rotatable
Flange
Figure 1 —
CF Flange Installation
Standard size inch tubing provides easy and economical
connection to the user’s equipment. Full and half nipples,
adapters to a variety of other connection elements, tees,
elbows, crosses, and flexible metal hoses for vibration
isolation and movement give the line added versatility.
With its extensive engineering capabilities, MKS provides
custom designed and manufactured shapes and sizes of
components. Custom vacuum chambers can be fabricated
as well as unique space and time saving fittings and
adapters.
table 1 - gaskets and torque
size
metal gasket Dimensions
in/(mm)
maximum torque
for sealing
ft./lbs
(newton-meters)
Outer Diameter
Inner Diameter
1 1/3''
0.84/(21)
0.64/(16)
5/(7)
2 1/8''
1.29/(33)
1.01/(26)
16/(22)
2 3/4''
1.90/(48)
1.45/(37)
16/(22)
3 3/8''
2.43/(62)
2.01/(51)
26/(35)
4 1/2''
3.24/(82)
2.51/(64)
26/(35)
4 5/8''
3.60/(91)
3.01/(76)
26/(35)
Note: Metal gaskets are .08'' thick.
specifications
Minimum Pressure
(with metal seals)
10
-13 Torr
Leak Check
< 10
-9 std-cc/s
Materials
Components
Gaskets
Bolts
Type 304 Stainless Steel
Copper, Silver Plated Copper or
Viton
Type 304 Stainless or Silver Plated
Stainless
Metal Gasket Thickness
.08''/(2.03 mm)


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