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100006292 Datasheet(PDF) 2 Page - MKS Instruments.

Part No. 100006292
Description  bUTTWELD fittings
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

100006292 Datasheet(HTML) 2 Page - MKS Instruments.

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MKS Series 23 is a family of buttweld vacuum fittings
manufactured by MKS Instruments, Inc. They are designed
to be used in conjunction with the full line of ISO-Universal,
ISO-KF and CF UHV flanges, and are easily welded to
the flanges or each other during on-site installation. All
components are made of type 304 stainless steel and are
specifically prepared for use in high vacuum process or
UHV applications.
Applications
Vacuum buttweld fittings are designed to be used in any
vacuum applications where minimizing the number of
sealed joints is critical.
• Semiconductorwaferfabricationareasforremote
installations and below a raised floor
• Permanenthousevacuumlines
• Vacuumutilitylinesforvacuumfixtures
• Hightemperaturelines
• Burnboxexhaustlines
Component Construction
The Series 23 components are constructed of 304 or
304L welded, drawn, and annealed stainless steel tubing.
(316L is available on request.) For most vacuum process
applications, this provides the best combination of the
following critical features:
• Lowoutgassingundervacuum
• Chemicallyresistant
• Annealedforconsistentleakfreewelding
• Minimizedcorrosionconcentrationpoints
• Goodavailability
• Costconsistentwiththeaboverequirements
Each component is fabricated using pulled port and 100%
penetrationTIGweldtechniques.Allweldedcomponents
are leak free, carefully cleaned for high vacuum use and
then packaged to remain clean until the time of installation.
Installation
Series 23 fittings are designed to be welded using
techniques preferred for vacuum applications. These
techniques include internal (socket type) welding and
external buttwelding. The most commonly used type of
weldforhighvacuumapplicationsisaTIG(Tungsten
InertGas)fusionweld,preferablywithoutfillerrod.Forthe
best results, remove components from packaging in clean
conditions during installation. Handle the components with
clean gloves and equipment in the absence of any fibers,
fingerprint oils, or other greases. If these precautions
are taken, the weld is more likely to be leak free and the
integrity of the vacuum surface will remain intact and ready
for use.
Generalhintsforgoodvacuumweldsinclude:
1. Always start with clean and properly weld prepped
components.
2. For internal welds, minimize warping by using only
enough heat for 60-75% penetration.
3. For external buttwelds, make sure they are 100%
penetration with no internal cracks or crevices.
4. Do not weld internally then externally around the entire
circumference of the fittings.
5. Make sure there is little or no gap between pieces to be
welded.
6. Ensure that all surfaces affected by the heat of the weld,
especially the vacuum side, are purged properly with
inert gas.
FormoredetailsonTIGandothervacuumjoining
methods, contact MKS in Boulder, CO.
CAD Drawings
CAD drawings for the Series 23 buttweld line can be
downloaded from our website at: https://www.mksinst.com/
product/category.aspx?CategoryID=157. From there, select
the appropriate fitting and click to download the file. The
drawingsareavailablein*.DWGformatand*.DXFformat.
Ordering Information
To obtain delivery, technical, or applications
information, contact MKS at (800) 345-1967 (US only) or
(303) 449-9861. Or visit our website at www.mksinst.com.


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