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100882014 Datasheet(PDF) 2 Page - MKS Instruments.
MKS [MKS Instruments.]
100882014 Datasheet(HTML) 2 Page - MKS Instruments.
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Manufactured by MKS to industry standards, Series 88
components are a full line of metal-sealed stainless steel
CF flanges and fittings that are interchangeable with ultra
high vacuum equipment made by other manufacturers.
MKS offers a complete system of interfacing components
including valves, which allows rapid assembly without
welding, brazing, or soldering. Most sizes and types of
fittings are available for immediate shipment from MKS’
distribution centers located throughout North America,
Asia, and Europe.
Series 88 CF flanges are suitable for applications requiring
a very clean environment, ultra high vacuum conditions,
high temperature, or where critical or dangerous materials
must be contained or excluded. These include:
1. Difficult applications with corrosive, radioactive, toxic or
air sensitive materials.
2. Materials creation and processing such as molecular
3. Analytical instrumentation including Auger electron
spectrometers, mass spectrometers, and electron
4. High energy physics installation such as accelerators
and fusion devices.
Series 88 is a line of CF-style fittings that are the standard
for ultra high vacuum applications. They use a flat gasket
placed between two knife edges to provide a vacuum tight
seal. Mating flanges have identical profiles, i.e., they are
sexless, eliminating the need to store two types or worry
Made with very high purity stainless steel and meticulous
cleaning procedures, Series 88 CF components are
suitable for use in the ultra high vacuum applications
to below 10
Torr and in temperatures from -196° to
500°C. The material characteristics of the flanges, seals,
screws, and nuts are selected to provide high performance
throughout a wide temperature range. Rotatable and
nonrotatable flanges in sizes from mini 1-1/3 to 4-5/8
inches (34 to 117 mm) are available with several bore
sizes to fit a range of tube diameters.
MKS uses the latest automated equipment to provide
the highest quality and consistency. Very high purity type
304 stainless steel is selected to have few inclusions.
Combined with MKS’ surface treatment and cleaning
procedures, this minimizes outgassing, permeability, and
leakage. Proper hardness is maintained to prevent the
knife edge from deteriorating.
CF components are assembled by inserting a gasket
between the two flange faces, then securing the assembly
with bolts. (See Figure 1.) Bolts should be tightened
diagonally, versus sequentially around the circumference,
for a secure vacuum seal. Assembly is cost effective
through reuse of components and inch dimensional stubs,
sockets, and tubes. The foolproof design provides leak tight
A variety of sealing hardware is available, such as plate
nuts, dodecagon (12 point head) bolts, Viton
individually wrapped copper and silver-plated copper
gaskets protected from corrosion and mechanical damage.
Plate nuts furnish the fastest, most convenient method
to close flanges, reduce required clearance, assemble
with one wrench, and are especially good in limited
accessibility. Assembly time reduces greatly, because bolts
are easier to start and tighten. The clearance needed is
half that of regular nuts. They eliminate the need and cost
for tapped flanges.
MKS is one of very few CF manufacturers who offer silver
plated bolts, including the convenient dodecagon (12 point
head) style, which greatly reduce the risk of seizure or
Copper gaskets make these flanges self-centering and the
standard leak grooves simplify troubleshooting and gasket
removal. MKS guarantees its CF flanges and fittings to
be leak free. OFHC copper gaskets are cleaned, insured
to be scratch free, individually sealed, and ready for use.
Individual packaging protects flange seal surfaces.
Silver-plated copper gaskets are available for systems that
require frequent high-temperature bakeout. This prevents
oxides from forming during the bakeout, which could
contaminate the system.
The Viton CF gasket offered by MKS has a unique
notching in the design, allowing less outgassing than most
CF flanges remain leak tight even after repeated cycling of
the temperature over a wide range. The availability of both
tapped and clearance bolt holes gives great flexibility.
Type 304 stainless steel is suited for assembly by tungsten
inert gas (TIG) welding; simple fusion welding without filler
metal is preferred. Users may braze components to the CF
flanges if desired. CF flanges seal properly when the faces
of mating flanges contact each other.
The rotatable versions simplify alignment with the bolt
holes of other system components and give infinitely
rotatable joints. All fittings have at least one rotatable
flange for easy alignment. Nonrotatable flanges provide
better knife edge protection. The precise tolerances to
which MKS fabricates its CF flanges insure an exact fit
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