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100882001 Datasheet(PDF) 4 Page - MKS Instruments. |
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100882001 Datasheet(HTML) 4 Page - MKS Instruments. |
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4 / 20 page  CF Flange Dimensions in/(mm) Flange Size A Nominal Tube Diameter B Flange Outside Diameter C Bolt Circle Diameter D Thickness E Number of Holes Tapped Holes Thread Thru Holes Diameter F Face to Counter Bore 1 1/3 2 1/8 2 3/4 3 3/8 4 1/2 4 5/8 .75 (19) 1.00 (25) 1.50 (38) 2.00 (51) 2.50 (64) 3.01 (76) 1.33 (34) 2.12 (54) 2.75 (70) 3.38 (86) 4.50 (114) 4.61 (118) 1.06 (27) 1.62 (41) 2.31 (59) 2.85 (72) 3.63 (92) 4.03 (102) .30 (8) .50 (13) .50 (13) .69 (18) .69 (18) .75 (19) 6 4 6 8 8 10 8-32 1/4-28 1/4-28 5/16-24 5/16-24 5/16-24 .172 (4.3) .265 (6.7) .265 (6.7) .332 (8.4) .332 (8.4) .332 (8.4) .18 (4.6) .17 (4.3) .21 (5.3) .22 (5.6) .38 (9.6) .38 (9.6) rotatable non-rotatable |
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