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IXZ-500 Datasheet(PDF) 6 Page - TDK Electronics

Part # IXZ-500
Description  Dual-Axis Gyro
Download  26 Pages
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Manufacturer  TDK [TDK Electronics]
Direct Link  http://www.tdk.com
Logo TDK - TDK Electronics

IXZ-500 Datasheet(HTML) 6 Page - TDK Electronics

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IXZ-500 Dual-Axis Gyroscope
Product Specification
PS-IXZ-0500B-00-03
Release Date: 06/04/09
CONFIDENTIAL & PROPRIETARY
6 of 26
5. Functional Block Diagram
Figure 1
6. Functional Description
6.1
Overview
The IXZ-500 gyroscope consists of two independent vibratory MEMS gyroscopes. One detects rotation about
the X-axis; the other detects rotation about the Z-Axis.
The gyroscope’s proof-masses are electrostatically oscillated at resonance. An internal automatic gain
control circuit precisely controls the oscillation of the proof masses. When the sensor is rotated about the X-
or Z-Axis, the Coriolis Effect causes a vibration that can be detected by a capacitive pickoff. The resulting
signal is amplified, demodulated, and filtered to produce an analog voltage that is proportional to the angular
rate.
6.2
Rate Sensors
The mechanical structures for detecting angular rate about the X- and Z-axes are fabricated using
InvenSense’s proprietary bulk silicon technology. The structures are covered and hermetically sealed at the
wafer level. The cover shields the gyro from electromagnetic and radio frequency interferences (EMI/RFI).
The dual-mass design inherently rejects any signal caused by linear acceleration. The X-gyro and the Z-gyro
have different resonant frequencies to prevent undesired coupling.
6.3
Oscillator Circuit
The oscillator circuit generates electrostatic forces to vibrate the structure at resonance. The circuit detects
the vibration by measuring the capacitance between the oscillating structure and a fixed electrode. The
oscillator circuit switches in quadrature phase with the capacitance measurement in order to vibrate at
resonance.
XAGC 6
ZAGC 15
AZ
24
X4.5OUT
7
14
20
16
IXZ-500
Memory
Trim
Demodulator
Oscillator
Demodulator
Oscillator
Coriolis
Sense
Output Gain
Output Gain
Z-Rate
Sensor
X-Rate
Sensor
1
VDD
Coriolis
Sense
Z4.5OUT
Charge Pump
CPOUT
12
5
Z-OUT
Z4.5IN
X4.5IN
X-OUT
Gain
Low-Pass
Filter
+
Gain
Low-Pass
Filter
+
Auto Zero
Auto Zero
Optional
External
Filters
Optional
External
Filters
Optional
PTAT
Sensor
23
VREF
Reference
22
Optional


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