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IXZ-500 Datasheet(PDF) 5 Page - TDK Electronics

Part # IXZ-500
Description  Dual-Axis Gyro
Download  26 Pages
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Manufacturer  TDK [TDK Electronics]
Direct Link  http://www.tdk.com
Logo TDK - TDK Electronics

IXZ-500 Datasheet(HTML) 5 Page - TDK Electronics

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IXZ-500 Dual-Axis Gyroscope
Product Specification
PS-IXZ-0500B-00-03
Release Date: 06/04/09
CONFIDENTIAL & PROPRIETARY
5 of 26
2. Purpose
The purpose of this document is to provide a detailed product description and design-related information
regarding the IXZ-500 dual-axis gyroscope.
3. Product Overview
The IXZ™ family of dual-axis MEMS gyroscopes feature the world’s first roll/yaw (X and Z-axis) MEMS gyros
that meet the in-plane mounting requirements of remote controls and interactive game controllers for digital
TVs, IPTVs, set top boxes, media centers and PCs. Traditionally, designers of remote controls have had to
use two single Z-axis or one dual-axis X/Y gyroscope, which because of their axes of sensitivity, required a
daughter card for mounting the angular rate sensors perpendicular to the rest of the system electronics. The
in-plane mounting of the IXZ family overcomes this limitation, enabling compelling form-factor designs.
The IXZ-500 is uniquely suited for motion-controlled menu-navigation applications. The device features a
primary output with a ±500°/sec full scale range, for measuring higher speed motions, and has a secondary
output with a ±110°/sec full-scale range, for sensing more precise movements. These dual outputs allow the
system designer to use an analog-to-digital-converter (ADC) with two fewer bits, saving overall system cost.
The IXZ-500 leverages InvenSense’s patented and volume-proven Nasiri-Fabrication platform, which
integrates MEMS wafers with companion CMOS electronics through wafer-level bonding to produce a
functionally complete, low-cost motion sensor. All required conditioning electronics are integrated into a
single chip measuring 4x5x1.2mm. It incorporates X- and Z-axis low-pass filters and an EEPROM for on-
chip factory calibration of the sensor. Factory trimmed scale factors eliminate the need for external active
components and end-user calibration.
A built-in Proportional-To-Absolute-Temperature (PTAT) sensor
provides temperature compensation information. The product is RoHS and Green Compliant.
4. Features
Integrated X- and Z-axis gyros on a single chip with in-plane mounting
Two separate outputs per axis for higher speed motions and lower-speed precise movements:
500°/s full scale range (higher speed)
110°/s full scale range (high precision)
Integrated amplifiers and low-pass filters
Auto Zero function for bias calibration
On-chip temperature sensor
High vibration rejection over a wide frequency range
High cross-axis isolation by proprietary MEMS design
3V single supply operation
Hermetically sealed for temp and humidity resistance
10,000 g shock tolerant
Smallest dual axis gyro package at 4mm x 5mm x 1.2mm
RoHS and Green Compliant


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