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100002353 Datasheet(PDF) 1 Page - MKS Instruments.

Part No. 100002353
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

100002353 Datasheet(HTML) 1 Page - MKS Instruments.

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Series 937B
The Series 937B combination vacuum gauge system is part of the MKS family of vacuum
gauges. It is the third generation of the very successful 937 Series. The 937B will operate
and display as many as six sensors simultaneously, and each controller can be configured
to the user’s gauging requirements. This highly flexible product enables a wide range of
gauging technologies, tailoring the system to each individual application. The Series 937B
combines the sensor technologies of the cold cathode, hot cathode, standard Pirani,
convection Pirani, MKS Baratron® capacitance manometer and absolute Piezo sensors to
measure from ultra-high vacuum to above atmospheric pressure.
Features & Benefits
• Providessimultaneousreadoutfora
combination of up to six vacuum gauges
• Widemeasurementrangeof10-11 to
20,000 Torr
• Intuitivemenuforeaseofsetup
• Largeeasytoreadbacklitdisplay
• User-configurableforunitsofpressurein
Torr, millibar, Pascal, or microns
• Operateshotandcoldcathodes,
Baratron capacitance manometers, Piezo
and Pirani sensors for maximum flexibility
• ConfigurableforuptosixheatedMKS
Baratron capacitance manometers
• Twelveindependentrelaysetpointsfor
improved process control with variable
• Fastresponsecoldcathodecard
protects vacuum system in the event of a
sudden pressure rise
• ComputerInterface:RS232,RS485(built
in) and Profibus DPV1 (optional)
• Independent,buffered,combinedand
standard analog outputs for each channel
• Gas-typesensitivityallowssensorstobe
used for rough leak detection
• Leaktestfunctionwithbargraphdisplay
and audio alarm
• Fieldupgradeable
• Modulardesign

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