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100002353 Datasheet(PDF) 7 Page - MKS Instruments.

Part No. 100002353
Description  DIGITAL COMBINATION VACUUM GAUGE SYSTEM
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

100002353 Datasheet(HTML) 7 Page - MKS Instruments.

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Ordering Information
Series 902B Piezo Transducer
Part Number
Type
902B-12010
902B-42010
902B-52010
902B-11010
902B-41010
902B-51010
902 Transducer, NW 16 KF, RS485
902 Transducer, 4 VCR-F*, RS485
902 Transducer, 8 VCR-F*, RS485
902 Transducer, NW 16 KF, RS232
902 Transducer, 4 VCR-F*, RS232
902 Transducer, 8 VCR-F*, RS232
*VCR® or VCO®-compatible parts may be used.
Mini-Ion Gauge Hot Cathode Sensor
Part Number
Type
100011085
100011111
100011112
100011113
100011114
100011118
100011127
Mini-Ion Gauge Sensor, Y
2O3 coated Ir filament, 1” Tube
Mini-Ion Gauge Sensor, Y
2O3 coated Ir filament, 1 1/3” CF
Mini-Ion Gauge Sensor, Y
2O3 coated Ir filament, 2 3/4” CF
Mini-Ion Gauge Sensor, Y
2O3 coated Ir filament, NW 25 KF
Mini-Ion Gauge Sensor, Y
2O3 coated Ir filament, NW 40 KF
Mini-Ion Gauge Sensor, Y
2O3 coated Ir filament, NW 16 KF
Mini-Ion Gauge Sensor, Y
2O3 coated Ir filament, 3/4” Tube
Nude Hot Cathode Ionization Vacuum Sensor
Part Number
Type
100005987
100005980
100006841
100006842
Nude Tube Sensor, Tungsten, NW 40 KF
Nude Tube Sensor, Tungsten, 2 3/4” CF
Nude Tube Sensor, Y
2O3 coated Ir, NW 40 KF
Nude Tube Sensor, Y
2O3 coated Ir, 2 3/4” CF
722B Baratron® Compact Absolute
Capacitance Manometer (RoHS Compliant)
Example: 722BXXXYYWGZ
Ranges (Torr) (XXX)
Code
10
100
1000
10000
25000
11T
12T
13T
14T
RCT
Fittings (Y)
1/2" tube
Swagelok 4 VCR female
Swagelok 8 VCR female
Swagelok 8 VCO® female
NW 16 KF
Mini-CF, rotatable
BA
CD
CE
DA
GA
HA
Input/Output (W)
+13 to +32 VDC input, 0-10 VDC output
2
Accuracy (G)
Standard: 0.5% of Rdg.
F
Connector (Z)
9-pin Type "D"
A
NOTE: High pressure units are not available with NW 16 KF fittings. Consult High Pressure
Fitting matrix or contact MKS Applications Engineering.
626B/627D Baratron® Absolute
Capacitance Manometer (RoHS Compliant)
Example: 626BXXXYZ; 626B with male Type D connector
627DXXXYZ; 627D with male Type D connector
Ranges (Torr) (XXX)
Code
0.1
0.25
1
2
10
20
100
500
1000
10000 (627D only)
20000 (627D only)
.1T
RET
01T
02T
11T
21T
12T
52T
13T
14T
24T
Fittings (Y)
1/2" tube
Swagelok 8 VCR female
Mini-CF, rotatable
NW 16 KF
Swagelok 8 VCO® female
2 3/4'' CF, rotatable
NW 25 KF
A
B
C
D
E
L
Q
Accuracy (Z)
Standard: 0.25% of Rdg.
(optional 0.10 Torr)
Standard: 0.50% of Rdg. (0.10 Torr)
Optional: 0.15% of Rdg.
(10, 100, 1000 Torr ranges only)
E
F
D
NOTE:
1. For gauge isolation, refer to MKS’s line of Cv™ Valves and the In Situ Diagnostics Access
(IDA™) Valve.
For complete product specifications and Baratron capacitance manometer datasheets, please visit the MKS website at www.mksinst.com.
Contact Applications Engineering for other capacitance manometer options.


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