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100002353 Datasheet(PDF) 6 Page - MKS Instruments.

Part No. 100002353
Description  DIGITAL COMBINATION VACUUM GAUGE SYSTEM
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

100002353 Datasheet(HTML) 6 Page - MKS Instruments.

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Base Controller
Country Code
Base Gauge Slot
“A”
Gauge Choice Slot
”B”
Gauge Choice Slot
“C”
Communication Port
Part Code
Part Code
Part Code
Part Code
Part Code
Part Code
937B
US
EU
UK
JP
CA
(Canada)
CC
Cold Cathode
CT
Dual
Convection Pirani/
Standard Pirani
CM
Dual Baratron/Piezo
HC
Hot Cathode Nude/
Mini-Ion Gauge
NA
Blank
CC
Cold Cathode
CT
Dual
Convection Pirani/
Standard Pirani
CM
Dual Baratron/Piezo
HC
Hot Cathode Nude/
Mini-Ion Gauge
NA
Blank
CC
Cold Cathode
CT
Dual
Convection Pirani/
Standard Pirani
CM
Dual Baratron/Piezo
HC
Hot Cathode Nude/
Mini-Ion Gauge
NA
Blank
PF
Profibus
NA
Blank
The basic Series 937B includes the controller, a power cable, accessory connector kit, and instruction manual. Space is provided
for up to three gauge modules and one communication module. Sample part number: 937B-US-CCCCCT-NA.
Plug-In Controller Modules
Part Number
Type
100018446
100015132
100015267
100015641
100015940
Cold Cathode
Dual Standard Pirani/Convection Pirani
Dual Capacitance Manometer/Piezo
Hot Cathode (Mini-Ion Gauge/Nude)
Profibus Card
Use these part numbers when purchasing boards separately for retrofit.
Accessories
Part Number
Type
103150001
RM-13
100016467
100006734
100002353
100005279
100007700
100016120
100016121
USA power cable
Half rack mounting kit
937B Instruction Manual
Rebuild kit for 431 cold cathode tube
Rebuild kit for I-Mag cold cathode
Spanner wrench for 431 rebuild
Full rack mounting kit
Adapter, SMA – F to BNC – M
Adapter, Connector, SMA – M to BNC – F
431 Cold Cathode Sensor
Part Number
Type
10431004
10431001
10431002
10431003
10431005
NW 25 KF
NW 40 KF
2 ¾” CF
1” Tube
8 VCR®-F
*VCR® or VCO®-compatible parts may be used.
I-Mag® Cold Cathode Sensor
Part Number
Type
104230004
104230001
104230002
104230003
NW 25 KF
NW 40 KF
2 ¾” CF
1” Tube
345 Standard Pirani Sensor
Part Number
Type
103450210
103450211
103450212
103450213
103450214
103450215
103450216
103450218
NW 16 KF
1/8” NPT-M ½” tube
8 VCR-F *
1 1/3” CF
2 ¾” CF
NW 25 KF
15 mm. Tube
18 mm. tube
*VCR® or VCO®-compatible parts may be used.
317 Shielded Convection Pirani Sensor
Part Number
Type
103170010SH
103170011SH
103170012SH
103170013SH
103170014SH
103170016SH
103170018SH
103170027SH
103170029SH
NW 16 KF
1/8” NPT-M ½” tube
8 VCR-F *
1 1/3” CF
2 ¾” CF
15 mm. Tube
18 mm. Tube
NW 25 KF
4 VCR®-F *
* VCR® or VCO®-compatible parts may be used.
275 Convectron Pirani Sensor
Part Number
Type
275203
275071
275282
275256
275238
275196
275185
NW 16 KF
1/8” NPT-M ½” tube
8 VCR-F *
1 1/3” CF
2 ¾” CF
NW 25 KF
4 VCR®-F *
* VCR® or VCO®-compatible parts may be used.


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