100002353 datasheet(5/8 Pages) MKS

Part #	100002353

Description	DIGITAL COMBINATION VACUUM GAUGE SYSTEM

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Manufacturer	MKS [MKS Instruments.]

Direct Link	https://www.mksinst.com/

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Specifications

Cold Cathode

Hot Cathode

Standard Pirani

Convectron/Convection

Enhanced Pirani

Absolute Piezo

MKS Baratron®

Models

Series 431 & I-Mag®

Mini Ion Gauge

Nude Hot Cathode

Ionization Vacuum Sensor

Series 345

Series 317/Series 275

Series 902B

722B, 626B and 627D

Sensor

Construction

(materials

exposed to

vacuum)

Series 431: Stainless

steel, silver-copper

brazing alloy,alumina

ceramics, aluminum AL

6061, Elgiloy®, OFHC®

copper

I-Mag:

Stainless steel, 6061

aluminum, Inconel®, glass

and alumina ceramic

Yttria-coated iridium,

nickel, 304 stainless steel,

glass, tungsten,platinum

clad molybdenum

Tungsten or yttria-coated

iridium(filament), nickel,

Inconel® X-750,

304 stainless steel, glass,

tungsten,platinum

304 stainless steel,

platinum alloy, silver

brazing alloy, nickel, glass

Series 317: 304 stainless

steel, nickel 200, glass,

platinum

Series 275: 304 stainless

steel, borosilicate glass,

Kovar®, Alumina, NiFe

alloy, polyimide

316 stainless steel

Inconel

Measurement

Range

1.0x10-11 to 1.0x10-2 Torr

1.3x10-11 to 1.3x10-2 mbar

1.3x10-9 to 1.3 Pascal

1.0x10-8 to 10 Micron

1.0x10-10 to 1.0x10-2 Torr

1.3x10-10 to 1.3x10-2 mbar

1.3x10-8 to 1.3 Pascal

1.0x10-8 to 1.0x10 Micron

1.0x10-10 to 1.0x10-2 Torr

1.3x10-10 to 1.3x10-2 mbar

1.3x10-8 to 1.3 Pascal

1.0x10-8 to 1.0x10 Micron

5.0x10-4 Torr to ATM

7.0x10-4 mbar to ATM

7.0x10-2 Pascal to ATM

5.0x10-1 Micron to ATM

1.0x10-3 to 1.0x10+3 Torr

1.3x10-3 to 1.3x10+3 mbar

1.3x10-1 to 1.3x10+5 Pascal

1.0x10+6 Micron

0.1 to 1000 Torr

0.13 to 1.3x10+3 mbar

13 to 1.3x10+5 Pascal

Three decades of

measurement below

Full Scale

Resolution

1% of indicated decade,

except 10% below 10-10

Torr and above 10-3 Torr

1% of indicated decade

% of indicated decade,

except 10% below

10-3 Torr and above

100 Torr - see text

1% of indicated decade

1 x 10-4 of Full Scale

Set Point

Response

120 milliseconds

100 milliseconds

120 milliseconds

Set Point Range

2.0x10-10 to 9.5x10-3 Torr

2.7x10-10 to 1.2x10-2 mbar

2.7x10-8 to 1.2 Pascal

2.0x10-7 to 9.5 micron

5.0x10-10 to 9.5x10-3 Torr

6.5x10-10 to 1.2x10-2 mbar

6.5x10-8 to 1.2 Pascal

5.0x10-8 to 9.5x10-1 micron

5.0x10-10 to 9.5x10-3 Torr

6.5x10-10 to 1.2x10-2 mbar

6.5x10-8 to 1.2 Pascal

5.0x10-8 to 9.5x10-1 micron

2.0x10-3 to 9.5x10+1 Torr

2.7x10-3 to 1.2x10+2 mbar

2.7x10-1 to 1.2x10+4 Pascal

2.0 to 9.5x10+4 micron

2.0x10-3 to 9.5x10+2 Torr

2.7x10-3 to 1.2x10+3 mbar

2.7x10-1 to 1.2x10+5 Pascal

2.0 to 9.5x10+5 micron

1.0 to 1.0x10+3 Torr

1.3 to 1.3x10+3 mbar

1.3x10+2 to 1.3x10+5 Pascal

Dependent on Full Scale

range

Reproducibility

5% of indicated pressure

0.3% of indicated pressure

*

Cables &

Connectors

Maximum length is 300 ft

Series 431: Cables

connected via bayonet type

coaxial connectors

I-Mag Tube Side:

molded connector with

a positive locking bolt

Controller Side: bayonet

connector and threaded

coaxial connector

Molded tube connector

with locking mechanism,

custom D-sub connector to

controller, maximum length

is 50 ft

Molded tube connector,

custom D subconnector to

controller, maximum length

is 50 ft

Maximum length is 500 ft

Series 345: 9-pin D-sub to

9-pin D-sub connectors,

multiconductor shielded

cable

Series 317: Maximum

length is 500 ft

9 pin D-sub connectors,

multiconductor shielded

cable

Series 275: 9 pin D-sub

connectors, multiconductor

shielded cable

Maximum length is 500 ft

9-pin D-sub to 9-pin D-sub

Maximum length is 50 ft.

9-pin D-sub with polarized

key to 15-pin D-sub

Operating

Temperature

0° to 70°C (32° to 158°F)A

high operating temperature

version of the Series

431 is available. Call for

information.

0° to 60°C

(32° to 140°F)

0° to 60°C

(32° to 140°F)

0° to 50°C

(32° to 122°F)

Series 317: 0° to 50°C

(32° to 122°F)

Series 275: 4° to 50°C

(39° to 122°F)

0° to 40°C

(32° to 104°F)

*

Bakeout

Temperature

Series 431: 100°C

(212°F) cables removed

250°C version available

I-Mag: to 400°C (752°F)

with CF flanges, with

magnet and cable removed

60°C with cable attached,

300°C with CF, 150°C

with KF

60°C with cable attached,

300°C with CF, 150°C with KF

50° C (122°F)

Series 317: 100°C

(212°F) shielded version

*Special order version

available to 250°C.

Series 275: 150°C

(302°F)

100°C (212°F),

non-operating

N/A

Weight

Series 431: 2.8 lbs.

(1.3 Kg) w/ CF

I-Mag: 2.0 lbs

(0.8 Kg) w/ CF

0.8 lb (360 g) CF flange

0.9 lb (400 g) CF flange

0.5 lb (200 g)

Series 317: 0.5 lb (200 g)

Series 275: 3 oz (85 g)

5.9 oz (170 g)

Dependent on selected

sensor*

Xray Limit

3 x 10-10 Torr

Sensitivity

12 Torr-1 (±20%)

9 Torr-1 (±20%)

Degas Power

5 W

20W

Emission

Current

1 mA at < 1 x 10-4 Torr,

100 μA at > 1 x 10-4 Torr,

regulated to ±3%

1 mA at < 1 x 10-4 Torr,

100 μA at > 1 x 10-4 Torr,

regulated to ±3%

Volume

Series 431: 1.8 in.3

(30 cm3) max

I-Mag: 0.9 in.3

(15 cm3) max

1.4 in.3 (23 cm3)

Zero

0.5 in.3 (8.0 cm3) maximum

Series 317: 2.0 in.3

(33 cm3) maximum

Series 275: 2.14 in.3

(35 cm3) maximum

0.06 in.3 (1.02 cm3)

Dependent on selected

sensor*

*For Baratron Capacitance Manometer information, please visit the MKS website at www.mksinst.com.

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