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100002353 Datasheet(PDF) 5 Page - MKS Instruments.

Part No. 100002353
Description  DIGITAL COMBINATION VACUUM GAUGE SYSTEM
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

100002353 Datasheet(HTML) 5 Page - MKS Instruments.

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Specifications
Cold Cathode
Hot Cathode
Standard Pirani
Convectron/Convection
Enhanced Pirani
Absolute Piezo
MKS Baratron®
Models
Series 431 & I-Mag®
Mini Ion Gauge
Nude Hot Cathode
Ionization Vacuum Sensor
Series 345
Series 317/Series 275
Series 902B
722B, 626B and 627D
Sensor
Construction
(materials
exposed to
vacuum)
Series 431: Stainless
steel, silver-copper
brazing alloy,alumina
ceramics, aluminum AL
6061, Elgiloy®, OFHC®
copper
I-Mag:
Stainless steel, 6061
aluminum, Inconel®, glass
and alumina ceramic
Yttria-coated iridium,
nickel, 304 stainless steel,
glass, tungsten,platinum
clad molybdenum
Tungsten or yttria-coated
iridium(filament), nickel,
Inconel® X-750,
304 stainless steel, glass,
tungsten,platinum
304 stainless steel,
platinum alloy, silver
brazing alloy, nickel, glass
Series 317: 304 stainless
steel, nickel 200, glass,
platinum
Series 275: 304 stainless
steel, borosilicate glass,
Kovar®, Alumina, NiFe
alloy, polyimide
316 stainless steel
Inconel
Measurement
Range
1.0x10-11 to 1.0x10-2 Torr
1.3x10-11 to 1.3x10-2 mbar
1.3x10-9 to 1.3 Pascal
1.0x10-8 to 10 Micron
1.0x10-10 to 1.0x10-2 Torr
1.3x10-10 to 1.3x10-2 mbar
1.3x10-8 to 1.3 Pascal
1.0x10-8 to 1.0x10 Micron
1.0x10-10 to 1.0x10-2 Torr
1.3x10-10 to 1.3x10-2 mbar
1.3x10-8 to 1.3 Pascal
1.0x10-8 to 1.0x10 Micron
5.0x10-4 Torr to ATM
7.0x10-4 mbar to ATM
7.0x10-2 Pascal to ATM
5.0x10-1 Micron to ATM
1.0x10-3 to 1.0x10+3 Torr
1.3x10-3 to 1.3x10+3 mbar
1.3x10-1 to 1.3x10+5 Pascal
1.0x10+6 Micron
0.1 to 1000 Torr
0.13 to 1.3x10+3 mbar
13 to 1.3x10+5 Pascal
Three decades of
measurement below
Full Scale
Resolution
1% of indicated decade,
except 10% below 10-10
Torr and above 10-3 Torr
1% of indicated decade
1% of indicated decade
% of indicated decade,
except 10% below
10-3 Torr and above
100 Torr - see text
1% of indicated decade
1% of indicated decade
1 x 10-4 of Full Scale
Set Point
Response
120 milliseconds
120 milliseconds
120 milliseconds
120 milliseconds
120 milliseconds
100 milliseconds
120 milliseconds
Set Point Range
2.0x10-10 to 9.5x10-3 Torr
2.7x10-10 to 1.2x10-2 mbar
2.7x10-8 to 1.2 Pascal
2.0x10-7 to 9.5 micron
5.0x10-10 to 9.5x10-3 Torr
6.5x10-10 to 1.2x10-2 mbar
6.5x10-8 to 1.2 Pascal
5.0x10-8 to 9.5x10-1 micron
5.0x10-10 to 9.5x10-3 Torr
6.5x10-10 to 1.2x10-2 mbar
6.5x10-8 to 1.2 Pascal
5.0x10-8 to 9.5x10-1 micron
2.0x10-3 to 9.5x10+1 Torr
2.7x10-3 to 1.2x10+2 mbar
2.7x10-1 to 1.2x10+4 Pascal
2.0 to 9.5x10+4 micron
2.0x10-3 to 9.5x10+2 Torr
2.7x10-3 to 1.2x10+3 mbar
2.7x10-1 to 1.2x10+5 Pascal
2.0 to 9.5x10+5 micron
1.0 to 1.0x10+3 Torr
1.3 to 1.3x10+3 mbar
1.3x10+2 to 1.3x10+5 Pascal
Dependent on Full Scale
range
Reproducibility
5% of indicated pressure
5% of indicated pressure
5% of indicated pressure
5% of indicated pressure
5% of indicated pressure
0.3% of indicated pressure
*
Cables &
Connectors
Maximum length is 300 ft
Series 431: Cables
connected via bayonet type
coaxial connectors
I-Mag Tube Side:
molded connector with
a positive locking bolt
Controller Side: bayonet
connector and threaded
coaxial connector
Molded tube connector
with locking mechanism,
custom D-sub connector to
controller, maximum length
is 50 ft
Molded tube connector,
custom D subconnector to
controller, maximum length
is 50 ft
Maximum length is 500 ft
Series 345: 9-pin D-sub to
9-pin D-sub connectors,
multiconductor shielded
cable
Series 317: Maximum
length is 500 ft
9 pin D-sub connectors,
multiconductor shielded
cable
Series 275: 9 pin D-sub
connectors, multiconductor
shielded cable
Maximum length is 500 ft
9-pin D-sub to 9-pin D-sub
Maximum length is 50 ft.
9-pin D-sub with polarized
key to 15-pin D-sub
Operating
Temperature
0° to 70°C (32° to 158°F)A
high operating temperature
version of the Series
431 is available. Call for
information.
0° to 60°C
(32° to 140°F)
0° to 60°C
(32° to 140°F)
0° to 50°C
(32° to 122°F)
Series 317: 0° to 50°C
(32° to 122°F)
Series 275: 4° to 50°C
(39° to 122°F)
0° to 40°C
(32° to 104°F)
*
Bakeout
Temperature
Series 431: 100°C
(212°F) cables removed
250°C version available
I-Mag: to 400°C (752°F)
with CF flanges, with
magnet and cable removed
60°C with cable attached,
300°C with CF, 150°C
with KF
60°C with cable attached,
300°C with CF, 150°C with KF
50° C (122°F)
Series 317: 100°C
(212°F) shielded version
*Special order version
available to 250°C.
Series 275: 150°C
(302°F)
100°C (212°F),
non-operating
N/A
Weight
Series 431: 2.8 lbs.
(1.3 Kg) w/ CF
I-Mag: 2.0 lbs
(0.8 Kg) w/ CF
0.8 lb (360 g) CF flange
0.9 lb (400 g) CF flange
0.5 lb (200 g)
Series 317: 0.5 lb (200 g)
Series 275: 3 oz (85 g)
5.9 oz (170 g)
Dependent on selected
sensor*
Xray Limit
3 x 10-10 Torr
3 x 10-10 Torr
Sensitivity
12 Torr-1 (±20%)
9 Torr-1 (±20%)
Degas Power
5 W
20W
Emission
Current
1 mA at < 1 x 10-4 Torr,
100 μA at > 1 x 10-4 Torr,
regulated to ±3%
1 mA at < 1 x 10-4 Torr,
100 μA at > 1 x 10-4 Torr,
regulated to ±3%
Volume
Series 431: 1.8 in.3
(30 cm3) max
I-Mag: 0.9 in.3
(15 cm3) max
1.4 in.3 (23 cm3)
Zero
0.5 in.3 (8.0 cm3) maximum
Series 317: 2.0 in.3
(33 cm3) maximum
Series 275: 2.14 in.3
(35 cm3) maximum
0.06 in.3 (1.02 cm3)
Dependent on selected
sensor*
*For Baratron Capacitance Manometer information, please visit the MKS website at www.mksinst.com.


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