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100006734 Datasheet(PDF) 7 Page - MKS Instruments. |
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100006734 Datasheet(HTML) 7 Page - MKS Instruments. |
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7 / 8 page  Ordering Information Series 902B Piezo Transducer Part Number Type 902B-12010 902B-42010 902B-52010 902B-11010 902B-41010 902B-51010 902 Transducer, NW 16 KF, RS485 902 Transducer, 4 VCR-F*, RS485 902 Transducer, 8 VCR-F*, RS485 902 Transducer, NW 16 KF, RS232 902 Transducer, 4 VCR-F*, RS232 902 Transducer, 8 VCR-F*, RS232 *VCR® or VCO®-compatible parts may be used. Mini-Ion Gauge Hot Cathode Sensor Part Number Type 100011085 100011111 100011112 100011113 100011114 100011118 100011127 Mini-Ion Gauge Sensor, Y 2O3 coated Ir filament, 1” Tube Mini-Ion Gauge Sensor, Y 2O3 coated Ir filament, 1 1/3” CF Mini-Ion Gauge Sensor, Y 2O3 coated Ir filament, 2 3/4” CF Mini-Ion Gauge Sensor, Y 2O3 coated Ir filament, NW 25 KF Mini-Ion Gauge Sensor, Y 2O3 coated Ir filament, NW 40 KF Mini-Ion Gauge Sensor, Y 2O3 coated Ir filament, NW 16 KF Mini-Ion Gauge Sensor, Y 2O3 coated Ir filament, 3/4” Tube Nude Hot Cathode Ionization Vacuum Sensor Part Number Type 100005987 100005980 100006841 100006842 Nude Tube Sensor, Tungsten, NW 40 KF Nude Tube Sensor, Tungsten, 2 3/4” CF Nude Tube Sensor, Y 2O3 coated Ir, NW 40 KF Nude Tube Sensor, Y 2O3 coated Ir, 2 3/4” CF 722B Baratron® Compact Absolute Capacitance Manometer (RoHS Compliant) Example: 722BXXXYYWGZ Ranges (Torr) (XXX) Code 10 100 1000 10000 25000 11T 12T 13T 14T RCT Fittings (Y) 1/2" tube Swagelok 4 VCR female Swagelok 8 VCR female Swagelok 8 VCO® female NW 16 KF Mini-CF, rotatable BA CD CE DA GA HA Input/Output (W) +13 to +32 VDC input, 0-10 VDC output 2 Accuracy (G) Standard: 0.5% of Rdg. F Connector (Z) 9-pin Type "D" A NOTE: High pressure units are not available with NW 16 KF fittings. Consult High Pressure Fitting matrix or contact MKS Applications Engineering. 626B/627D Baratron® Absolute Capacitance Manometer (RoHS Compliant) Example: 626BXXXYZ; 626B with male Type D connector 627DXXXYZ; 627D with male Type D connector Ranges (Torr) (XXX) Code 0.1 0.25 1 2 10 20 100 500 1000 10000 (627D only) 20000 (627D only) .1T RET 01T 02T 11T 21T 12T 52T 13T 14T 24T Fittings (Y) 1/2" tube Swagelok 8 VCR female Mini-CF, rotatable NW 16 KF Swagelok 8 VCO® female 2 3/4'' CF, rotatable NW 25 KF A B C D E L Q Accuracy (Z) Standard: 0.25% of Rdg. (optional 0.10 Torr) Standard: 0.50% of Rdg. (0.10 Torr) Optional: 0.15% of Rdg. (10, 100, 1000 Torr ranges only) E F D NOTE: 1. For gauge isolation, refer to MKS’s line of Cv™ Valves and the In Situ Diagnostics Access (IDA™) Valve. For complete product specifications and Baratron capacitance manometer datasheets, please visit the MKS website at www.mksinst.com. Contact Applications Engineering for other capacitance manometer options. |
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