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100006734 Datasheet(PDF) 4 Page - MKS Instruments.

Part No. 100006734
Description  DIGITAL COMBINATION VACUUM GAUGE SYSTEM
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

100006734 Datasheet(HTML) 4 Page - MKS Instruments.

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937B Controller Specifications
Measurement Range
1.0 x 10-11 to 20,000 Torr
1.0 x 10-11 to 2.7 x 10+4 mbar
1.0 x 10-9 to 2.7 x 10+6 Pascal
1.0 x 10-8 to 2.0 x 10+7 microns
Operating Temperature
5° to 40° C (41° to 104°F)
Storage Temperature
-10° to 55°C (14° to 131°F)
Relative Humidity
80% max for temperatures less than 31°C,
decreasing linearly to 50% maximum at 40°C
Power Requirement
and Consumption
150 watts maximum
100 - 240 VAC 50/60 Hz
Set Point Relays
Twelve pressure dependent set points; SPDT relays,
contact rating 2 amps @ 30 Vac
Output
Buffered, log linear & linear output for each channel
& channel combinations
Front Panel Controls
Power on-off switch, setup and operational
commands can be accessed via the keypad
Display
320x240 color QVGA TFT LCD with back lighting.
Up to 6 pressure displays. Display indicators for
unit of measure, calibration functions, user
calibration, set points, gauge position indicators
Leak Test
Relative logarithmic bar graph display and variable
rate audio signal
Insulation Coordination
Over voltage Category II, Pollution Degree 2
Controller Weight
8 lbs (3.6 kg)
Compliance
CE
431 Cold Cathode Sensor
Size
A (in./mm)
NW 25 KF
NW 40 KF
2 3/4” CF (non-rotatable)
1” Tube
8 VCR-F*
6.72 (171)
6.32 (161)
6.27 (159)
6.22 (158)
7.59 (193)
*VCR® or VCO®-compatible parts may be used.
275 Convectron® Pirani Sensor
Size
H (in./cm)
NW 16 KF
NW 25 KF
NW 40 KF
1 1/3” CF
2 3/4” CF
1/8”/1/2” tubulation
1/4” VCR-F
1/2” VCR-F
3/8” VCO-M
2.70 (6.86)
2.70 (6.86)
2.70 (6.86)
2.50 (6.35)
2.50 (6.35)
2.50 (6.35)
2.80 (7.11)
3.20 (8.13)
3.10 (7.11)
*VCR® or VCO®-compatible parts may be used.
317 Convection Enhanced Pirani Sensor
Size
A in./mm
NW 16 KF
NW 25 KF
1 1/3” CF
2 3/4” CF
8 VCR-F*
4 VCR-F*
1/8” NPT-M
15 & 18 mm
2.76 (70)
2.76 (70)
3.06 (78)
2.73 (69)
2.83 (72)
2.51 (64)
2.93 (74)
3.19 (81)
*VCR® or VCO®-compatible parts may be used.
I-Mag® Cold Cathode Sensor
Size
Dimension A (in./mm)
NW 25 KF
NW 40 KF
2 3/4” CF rotatable
1” Tube
3.41 (87)
3.41 (87)
3.47 (88)
3.26 (83)
902B Absolute Piezo Diaphragm Sensor
Size
Dimension A (in./mm)
NW 16 KF
1/8’’ NPT-F
4 (1/4”) VCR-F*
8 (1/2”) VCR-F*
(1.93) 49.1
(3.50) 89.0
(3.20) 81.4)
(3.24) 82.4
*VCR® or VCO®-compatible parts may be used.
Mini-Ion® Gauge
Size
A (in./mm)
NW 16 KF
NW 25 KF
NW40 KF
1 1/3” CF
2 3/4” CF
1” Tube
3/4” Tube
3.07 (78)
2.31 (59)
2.31 (59)
3.45 (88)
2.37 (60)
2.16 (55)
3.95 (100)
Nude Hot Cathode Ionization Vacuum Sensor
Size
Dimension A (in./mm)
NW 40 KF
2 3/4” CF
1.89 (48)
1.94 (49)
Capacitance Manometer (Baratron®)
Dimension A (in./mm)
626B/627D
722B
NW 16 KF
1 1/3” CF
1/2” Tube
8 VCR-F* (low range)
8 VCR-F* (high range)
8 VCO-F*
Dimension A
Weld Stub
Dimension B
5.18 (132)
5.05 (128)
4.93 (125)
6.05 (154)
6.14 (156)
6.05 (154)
2.56 (65)
4.70 (119)
4.57 (116)
4.75 (121)
5.57 (142)
5.66 (144)
5.57 (142)
3.94 (100)
1.50 (38)
*VCR® or VCO®-compatible parts may be used.
345 Standard Pirani Sensor
Size
A (in./mm)
NW 16 KF
NW 25 KF
1 1/3” CF
2 3/4” CF
8 VCR-F*
1/8” NPT-M
15 & 18 mm
4.83 (123)
4.34 (110)
5.87 (149)
5.87 (149)
5.83 (148)
5.65 (144)
5.78 (147)
*VCR® or VCO®-compatible parts may be used.
H
1.3
(0.5)
4.3
(1.7)
9.4
(3.7)
13.2
(5.2)
1.9
(.75)
minimum for
connector removal
3.8
(1.5)


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