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100006734 Datasheet(PDF) 3 Page - MKS Instruments. |
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100006734 Datasheet(HTML) 3 Page - MKS Instruments. |
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3 / 8 page  rates. The hot cathode gauge calibration depends on the gas type, because ionization probability differs for each gas. The dependence makes it possible to use the hot cathode gauge as a leak detector. Cold Cathode Sensors In a cold cathode gauge, ionization is the result of a high voltage discharge of electrons. Sensitivity is enhanced by a magnetic field. Cold cathode gauges are rugged sensors without filaments to break or burnout. There are two cold cathode gauges: the Series 431 and the I-Mag®. All inverted magnetron designs include an isolated collector. This dual feed through approach makes the MKS cold cathode less susceptible to contamination and allows for a wide pressure measurement range. The I-Mag Cold Cathode Sensor provides a lower cost alternative to the 431 where high operating temperature is not important. The sensor is more compact, less expensive and easier to maintain. If bakeout is required, the magnets and sensor connectors can be removed and the sensor can be baked to 400°C. In addition, we provide a variety of customized gauges to suit specific customer needs. This includes special sensors for many semiconductor processes as well as high energy physics facilities. We have special versions of the 431 that will operate at 250°C or that can be used in high radiation environments. Description Capacitance Manometers Capacitance manometers supported by the 937B controller include the MKS Baratron® Series 722, 626 and 627D. Capacitance manometers measure pressure directly by measuring the deflection of a thin Inconel® diaphragm. Capacitance manometers are widely known for their accuracy and reliability and are available in Full-Scale ranges from 20,000 Torr to 0.02 Torr with three decades of reading when connected to the 937B. Absolute Piezo Transducer The Series 902B Piezo transducer combines the pressure measurement technology of a Piezo sensor with an integrated electronic control circuit. The 902B Piezo is an absolute direct reading sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range (10 to 1,000 Torr). The Series 902B Piezo is used in conjunction with the capacitance manometer card. Hot Cathode Sensors Hot cathode vacuum measurement is based on the ionization probability of a gas in a defined volume. Hot cathode sensors are Bayard-Alpert style, which utilizes a fine wire collector located in the center of a grid. Because of its small area, few x-rays hit the collector and the gauge can measure pressures to very low levels. The Series 937BoperatestheMiniIonGaugeandtheLowPressure Nude Hot Cathode sensor. Both sensors will measure from 10-2 to 10-10 Torr and include dual filaments for reduced downtime. Mini Ion Gauge ThecompactMini-IonGaugeisanidealreplacementfor the older glass BA gauge. It is significantly smaller than a glass gauge, but has the same fitting options, so it is easy to install on any system. Additionally, there is no glass envelope to break, so safety concerns are minimized. Each Mini-IonGaugehastwoyttria-coatediridiumfilaments and a screen to shield the grid and filaments from large particles. Nude Hot Cathode Ionization Vacuum Sensor The Low Power Nude Tube is available with a choice of yttria-coated iridium or tungsten filaments. Since the sensing portion of the tube is located within the vacuum system and experiences the system true pressure, nude tubes give a representative pressure measurement and respond more quickly to pressure changes than a glass envelope sensor. This minimizes the effects of tube pumping and outgassing as seen with glass tubes. The yttria-coated iridium filament is resistant to damage caused by high oxygen partial pressures and accidental exposure to atmosphere. The tube operates at lower temperatures, giving a lower chemical reaction rate and minimizing thermal interference. At low pressures, tubes with tungsten filaments have the advantage of low internal outgassing |
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