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100006734 Datasheet(PDF) 2 Page - MKS Instruments. |
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100006734 Datasheet(HTML) 2 Page - MKS Instruments. |
2 / 8 page Dimensional Drawing — Dimensions are nominal value in inches (millimeters referenced). The Controller The 937B controller is designed for versatility, reliability and economy. The large, easy to read, liquid crystal display provides readout for up to six sensors simultaneously. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections. Set Points Twelve independently adjustable set points are standard. This allows for the automation of process related functions. The set point values are nonvolatile and remain unchanged after power down or power failure. They are easily viewed and configured in the channel set up screen. The 937B also includes an adjustable control set point that turns the cold cathode or hot cathode gauges power off or on, at the desired pressures, extending the sensor’s life. Leak Test The leak test mode includes a bar graph and variable audible alert to assist in locating leaks within a system. The function operates with the cold cathode, hot cathode, Pirani, and convection sensors. By taking advantage of differences in tracer gas sensitivity, this provides an excellent tool for helping locate coarse system leaks. Analog Output Signals The controller provides analog output signals accessible on the rear panel connector. Three types of analog signals are available. Unprocessed analog signals are used to provide the fastest response times. The logarithmic output voltages are scaled so that 0.6 Volts equals one decade of pressure. Combination output can be created by combining up to three sensors with a combined range from 10-11 to 20,000 Torr. Digital Signals In addition to analog outputs, the 937B communicates digitally for direct computer communication with built in connections for RS232 or RS485. A communication slot in the 937B chassis accepts an optional Profibus DPV1 board. The 937B can communicate with a host computer using either of these ports. Remote control of set points and cold cathode high voltage disable are some of the many features available with communications options. Pirani Sensors In Pirani-type sensors, vacuum measurement is based on thermal conductivity of the gas. The sensor tube contains a fine wire that is maintained at a constant temperature. Heat transferred from the wire relates to the amount of gas present and is used to indicate pressure. There are two types of Pirani tubes that can be run on the 937B. Both the standard and convection enhanced Pirani’s are shielded and CE approved. Convectron® Pirani – Series 275 MKS Convectron® gauges have been the world-standard convection-enhanced Pirani gauge for over 35 years and are used in thousands of vacuum processes to accurately measure pressure from atmosphere to 10-3 Torr. To assure the highest level of accuracy and gauge-to-gauge reproducibility, every Convectron gauge is individually calibrated at the factory, thereby making controller adjustment unnecessary. Standard Pirani - Series 345 The Standard Pirani sensor will read continuously from 5x10-4 Torr to 100 Torr. Pressure readings above 100 Torr read as 200 Torr, 400 Torr, and Atmosphere. The sensor has a greater signal output at the high vacuum end of its range, providing an added half decade of reading, down to 5x10-4 Torr. The Pirani platinum filament ensures compatibility with a wide array of process gases. Only UHV compatible materials are exposed to vacuum. The 345 Pirani sensor is shielded for use where CE marking is a requirement and has a standard 9-pin D-sub connector. Convection Enhanced Pirani - Series 317 The convection Pirani style sensor design enhances heat transfer through convection at higher pressures. This sensor will read continuously with full resolution from 1x10-3 Torr to 1,000 Torr, providing a continuous readout above 100 Torr. A 250°C bakeable version is available upon request. |
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