 |
Electronic Components Datasheet Search |
|
|
Electronic Components Datasheet Search |
|
E27F Datasheet(PDF) 2 Page - MKS Instruments. |
|
||||||||||||||||||||||||||||||
E27F Datasheet(HTML) 2 Page - MKS Instruments. |
|
|
2 / 16 page  • Full Scale pressure/vacuum ranges as low as 0.02 Torr (mm Hg) allow for accurate measurement of vacuum as low as 2 x 10-4 Torr (1.5 x 10-4 mbar) • All products are specified in percent of reading for best accuracy and improved process yield • Complete line of absolute manometers including products operating at internal temperatures of up to 200°C. Widest product range and applications experience available anywhere • Direct measurement of chamber total pressure independent of gas type or composition, eliminating need for lookup tables and conversion factors • Best-available long-term output stability ensures state-of-the-art process repeatability in nearly any application • Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment, including halogens, deionized water and steam, and ozone • High overpressure limit ensures reliability from occasional system mishaps 600 Series Analog Capacitance Manometers The MKS 600 Series absolute analog Baratron® capacitance manometers are designed for accurate, repeatable pressure and vacuum measurements in demanding production or research process environments. The proven sensor, electronics, and packaging designs combine to provide the most stable and reliable low- pressure measurement instrument available. Product Description The MKS 600 Series Baratron capacitance manometers are analog capacitance-based pressure and vacuum gauges that require ±15VDC input power and provide a high-level 0-10VDC output signal linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signal- conditioning electronic circuits. The radially-tensioned Inconel diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system. Features and Benefits |
Similar Part No. - E27F |
|
Similar Description - E27F |
|
|
|
Link URL |
| Privacy Policy |
| ALLDATASHEET.COM |
| Does ALLDATASHEET help your business so far? [ DONATE ] |
About Alldatasheet | Advertisement | Datasheet Upload | Contact us | Privacy Policy | Link Exchange | Manufacturer List All Rights Reserved©Alldatasheet.com |
| Russian : Alldatasheetru.com | Korean : Alldatasheet.co.kr | Spanish : Alldatasheet.es | French : Alldatasheet.fr | Italian : Alldatasheetit.com Portuguese : Alldatasheetpt.com | Polish : Alldatasheet.pl | Vietnamese : Alldatasheet.vn Indian : Alldatasheet.in | Mexican : Alldatasheet.com.mx | British : Alldatasheet.co.uk | New Zealand : Alldatasheet.co.nz |
|
Family Site : ic2ic.com |
icmetro.com |
English ▼
English
Chinese
German
Japanese
Russian
Korean
Spanish
French
Italian
Portuguese
Polish
Vietnamese
Indian
Mexican
British
New Zealand
