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FS1012-1100-NG Datasheet(PDF) 4 Page - Integrated Device Technology |
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FS1012-1100-NG Datasheet(HTML) 4 Page - Integrated Device Technology |
4 / 6 page FS1012 Datasheet © 2017 Integrated Device Technology, Inc. 4 July 20, 2017 Symbol Parameter Conditions Minimum Typical Maximum Units Standard Gas Flow Range[b], [c] Gas Flow FS1012-1020-NG 0 2 (2000) SLPM (SCCM) FS1012-1100-NG 0 10 (10000) SLPM (SCCM) Standard Liquid Flow Range[b], [c] Liquid Flow FS1012-1001-LQ 0 0.5 (500) SLPM (SCCM) FS1012-1002-LQ 0 1.0 (1000) SLPM (SCCM) [a] Sensor specifications are tested at the wafer die level. [b] SLPM: Standard liter per minute. [c] SCCM: Standard cubic centimeter per minute. |
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