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MPXM2010D Datasheet(PDF) 1 Page - Motorola, Inc |
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MPXM2010D Datasheet(HTML) 1 Page - Motorola, Inc |
1 / 8 page 10 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors The MPXM2010 device is a silicon piezoresistive pressure sensors providing a highly accurate and linear voltage output — directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film resistor network integrated on–chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. Features • Temperature Compensated Over 0°C to +85°C • Available in Easy–to–Use Tape & Reel • Ratiometric to Supply Voltage • Gauge Ported & Non Ported Options Application Examples • Respiratory Diagnostics • Air Movement Control • Controllers • Pressure Switching Figure 1 shows a block diagram of the internal circuitry on the stand–alone pressure sensor chip. Figure 1. Temperature Compensated Pressure Sensor Schematic VS 3 SENSING ELEMENT THIN FILM TEMPERATURE COMPENSATION AND CALIBRATION CIRCUITRY 2 4 Vout+ Vout- 1 GND VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the sensor is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly, output voltage increases as increasing vacuum is applied to the vacuum side (P2) relative to the pressure side (P1). Preferred devices are Motorola recommended choices for future use and best overall value. Order this document by MPXM2010/D MOTOROLA SEMICONDUCTOR TECHNICAL DATA © Motorola, Inc. 2002 MPXM2010 SERIES 0 to 10 kPa (0 to 1.45 psi) 25 mV FULL SCALE SPAN (TYPICAL) PIN NUMBER 1 2 Gnd +Vout 3 4 VS –Vout Motorola Preferred Device MPXM2010D/DT1 CASE 1320 MPXM2010GS/GST1 CASE 1320A SCALE 1:1 SCALE 1:1 MPAK PACKAGE REV 1 |
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