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TS83C51RD2 Datasheet(PDF) 5 Page - ATMEL Corporation |
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TS83C51RD2 Datasheet(HTML) 5 Page - ATMEL Corporation |
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5 / 17 page  Qualpack TS87C51RD2/TS83C51RD2 June 2001 5 Atmel Wireless & Microcontrollers 3.2 Product Design Die Size 4260µm * 4300µm (17.47mm2) Pad Size Opening 80µm * 80µm Logic Effective Channel Length 0.5 µm Gate Poly Width (min.) 0.50 µm Gate Poly Spacing (min.) 0.60 µm Metal 1 Width 0.60 µm Metal 1 Spacing 0.70 µm Metal 2 Width 0.80 µm Metal 2 Spacing 0.70 µm Metal 3 Width 0.80 µm Metal 3 Spacing 0.70 µm Contact size 0.60µm Via 1 size 0.60µm Via 2 size 0.60µm |
Similar Part No. - TS83C51RD2 |
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