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SFC5400 Datasheet(PDF) 4 Page - List of Unclassifed Manufacturers |
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SFC5400 Datasheet(HTML) 4 Page - List of Unclassifed Manufacturers |
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4 / 12 page  CMOSens SFC5400 / SFM5400 Mass Flow Controller / Meter for Gases www.sensirion.com October 2016 – V12 4/12 1.1 Accuracy Figure 4 compares the set point accuracy of a conventional mass flow controller / meter with a CMOSens SFC5400 / SFM5400. Typically, an accuracy of 1% FS (full scale) is stated for mass flow controllers using conventional sensor technology. The graph shows this in relation to the accuracy of the SFC5400 mass flow controller. It can be seen that especially at low flow rates the CMOSens technology reaches superior performance. Figure 4: Accuracy comparison of the CMOSens® SFC5400 / SFM5400 device compared to a typical thermal mass flow controller / meter. 1.2 Repeatability Figure 5: Repeatability comparison of the CMOSens® SFC5400 / SFM5400 device compared to a typical thermal mass flow controller / meter. 1.3 Settling time The CMOSens SFC5400 mass flow controller has an ultra-fast settling time. Figure 6 shows the typical response time of the SFC5400 in comparison to a mass flow controller using conventional sensor technology. Figure 6: Settling time of the SFC5400 vs. typical thermal mass flow controller. 1.4 Wide control range Ultra-wide control range of the SFC5400 brings a decisive benefit in applications with a wide dynamic range of gas flows. Instead of two devices used for high flow and low flow ranges, a single SFC5400 device can efficiently cover a flow range of three orders of magnitude. 1.5 Multiple gases, ranges & gas recognition For large OEM projects, the new SFC5400 / SFM5400 can be equipped with multigas feature allowing switching between a set of gas calibrations saved in the device memory. Similarly, different ranges for the same gas can be stored. Another interesting OEM feature is gas recognition. It allows performing a check whether the activated gas calibration matches the media in the gas line. This is a safety feature which prevents wrong operation due to mistake of user etc. |
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