6

1000

500

125

50

-50

-125

-500

-1000

-200

-100

-40

-20

20

40

100

200

Current (mA)

Voltage (V)

HPSMU measurement and output range

Power consumption

Voltage source mode

Voltage range

Power

2 V

20 x Ic (W)

20 V

20 x Ic (W)

40 V

40 x Ic (W)

100 V

100 x Ic (W)

200 V

200 x Ic (W)

Where Ic is the current compliance setting.

Current source mode

Voltage compliance

Power

Vc ≤ 20

20 x Io (W)

20 < Vc ≤ 40

40 x Io (W)

40 < Vc ≤ 100

100 x Io (W)

100 < Vc ≤ 200

200 x Io (W)

Where Vc is the voltage compliance

setting and Io is output current.

Current range, resolution, and accuracy (high speed ADC)

Current

range

Force

resolution

Measure

resolution¹

Force accuracy²

Measure accuracy²

Maximum voltage

±1 nA

50 fA

10 fA

±(0.1 %+300 fA+1 fA x Vo)

±(0.25 %+300 fA+1 fA x Vo)

200 V

±10 nA

500 fA

10 fA

±(0.1 %+3 pA+10 fA x Vo)

±(0.25 %+2 pA+10 fA x Vo)

200 V

±100 nA

5 pA

100 fA

±(0.05 %+30 pA+100 fA x Vo)

±(0.1 %+20 pA+100 fA x Vo)

200 V

50 pA

1 pA

±(0.05 %+300 pA+1 pA x Vo)

±(0.1 %+200 pA+1 pA x Vo)

200 V

500 pA

10 pA

±(0.05 %+3 nA+10 pA x Vo)

±(0.05 %+2 nA+10 pA x Vo)

200 V

5 nA

100 pA

±(0.035 %+15 nA+100 pA x Vo)

±(0.05 %+20 nA+100 pA x Vo)

200 V

±1 mA

50 nA

1 nA

±(0.04 %+150 nA+1 nA x Vo)

±(0.04 %+200 nA+1 nA x Vo)

200 V

±10 mA

500 nA

10 nA

200 V

±100 mA

100 nA

³

±1 A

³

1. Specified measurement resolution is limited by fundamental noise limits.

2. ± (% of read value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo))

3. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in Amps.