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16493R-102 Datasheet(PDF) 8 Page - Agilent(Hewlett-Packard) |
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16493R-102 Datasheet(HTML) 8 Page - Agilent(Hewlett-Packard) |
8 / 23 page 7 Output terminal/connection Dual triaxial connector, Kelvin (remote sensing) Voltage/current compliance (limiting) The SMU can limit output voltage or current to prevent damaging the device under test. Voltage: 0 V to ±100 V (MPSMU, HRSMU) 0 V to ±200 V (HPSMU) Current: ±10 fA to ±100 mA (HRSMU with ASU) ±100 fA to ±100 mA (HRSMU) ±1 pA to ±100 mA (MPSMU) ±1 pA to ±1 A (HPSMU) Compliance accuracy: Same as the current or voltage set accuracy. About measurement accuracy RF electromagnetic field and SMU measurement accuracy: SMU voltage and current measure- ment accuracy can be affected by RF electromagnetic field strengths greater than 3 V/m in the frequency range of 80 MHz to 1 GHz. The extent of this effect depends upon how the instrument is positioned and shielded. Induced RF field noise and SMU measurement accuracy: SMU voltage and current measurement accuracy can be affected by induced RF field noise strengths greater than 3 V rms in the frequency range of 150 kHz to 80 MHz. The extent of this effect depends upon how the instrument is positioned and shielded. Pulse measurement Pulse width: 500 µsec to 2 s Pulse period: 5 ms to 5 s Period ≥ width + 2 ms (when width ≤ 100 ms) Period ≥ width + 10 ms (when width > 100 ms) Pulse resolution: 100 µs SMU pulse setting accuracy (fixed measurement range, supplemental information): Width: 0.5 % + 50 µs Period: 0.5 % + 100 µs Supplemental information Maximum allowable cable resistance (Kelvin connection): Sense: 10 Ω Force: 10 Ω (≤ 100 mA), 1.5 Ω (>100 mA) Voltage source output resistance: (Force line, Non-Kelvin connection) 0.2 Ω (HPSMU) 0.3 Ω (MPSMU, HRSMU) Voltage measurement input resistance: ≥ 1013 Ω Current source output resistance: ≥ 1013 Ω (1 nA range) Current compliance setting accuracy (for opposite polarity): For 1 pA to 10 nA ranges: I setting accuracy ±12 % of range For 100 nA to 1 A ranges: I setting accuracy ±2.5 % of range Maximum capacitive load: 1 pA to 10 nA ranges: 1000 pF 100 nA to 10 mA ranges: 10 nF 100 mA and 1 A ranges: 100 µF Maximum guard capacitance: 900 pF (HPSMU, MPSMU, HRSMU) 660 pF (HRSMU with ASU) Maximum shield capacitance: 5000 pF (HPSMU, MPSMU, HRSMU) 3500 pF (HRSMU with ASU) Maximum guard offset voltage: ±1 mV (HPSMU) ±3 mV (MPSMU, HRSMU) ±4.2 mV (HRSMU with ASU, Iout≤100 µA) Noise characteristics (filter ON): Voltage source: 0.01 % of V range (rms.) Current source: 0.1 % of I range (rms.) Overshoot (typical, filter ON): Voltage source: 0.03 % of V range Current source: 1 % of I range Range switching transient noise (filter ON): Voltage ranging: 250 mV Current ranging: 70 mV Slew rate: 0.2 V/µs (maximum) Voltage range, resolution, and accuracy (high speed ADC) Voltage range Measure resolution Measure accuracy¹, ² ±0.5 V³ 25 µV ±(0.01 % + 250 µV) ±2 V 100 µV ±(0.01 % + 700 µV) ±5 V³ 250 µV ±(0.01 % + 2 mV) ±20 V 1 mV ±(0.01 % + 4 mV) ±40 V 2 mV ±(0.015 % + 8 mV) ±100 V 5 mV ±(0.02 % + 20 mV) ±200 V4 10 mV ±(0.035 % + 40 mV) 1. ± (% of read value + offset voltage V) 2. Averaging is 128 samples in 1 PLC. 3. Only for MPSMU and HRSMU. 4. Only for HPSMU. Current range, resolution, and accuracy (high speed ADC) Current range Measure resolution¹, ² Measure accuracy3 ±1 pA4 100 aA ±(1.8 %+12 fA) ±10 pA5 1 fA ±(0.5 %+15 fA+10 aA x Vo) ±100 pA5 5 fA ±(0.3 %+30 fA+100 aA x Vo) ±1 nA 50 fA ±(0.1 %+300 fA+1 fA x Vo) ±10 nA 500 fA ±(0.1 %+2 pA+10 fA x Vo) ±100 nA 5 pA ±(0.05 %+20 pA+100 fA x Vo) ±1 µA 50 pA ±(0.05 %+200 pA+1 pA x Vo) ±10 µA 500 pA ±(0.04 %+2 nA+10 pA x Vo) ±100 µA 5 nA ±(0.03 %+20 nA+100 pA x Vo) ±1 mA 50 nA ±(0.03 %+200 nA+1 nA x Vo) ±10 mA 500 nA ±(0.03 %+2 µA+10 nA x Vo) ±100 mA 5 µA ±(0.04 %+20 µA+100 nA x Vo) ±1 A6 50 µA ±(0.4 %+300 µA+1 µA x Vo) 1. Specified measurement resolution is limited by fundamental noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits. 2. Measurements made in the lower ranges can be greatly impacted by vibrations and shocks. These specifications assume an environment free of these factors. 3. ± (% of read value + offset current (fixed part determined by the output/ measurement range + proportional part that is multiplied by Vo) 4. 1 pA range is for HRSMU with ASU. 5. 10 pA range and 100 pA range is for HRSMU with or without ASU. 6. Only for HPSMU. |
Similar Part No. - 16493R-102 |
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Similar Description - 16493R-102 |
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