3

Maximum module configuration

The B1500A can contain up to 4 dual-slot

SMUs (HPSMUs) and 2 single-slot SMUs

(MPSMUs and/or HRSMUs); it can contain

up to 10 single-slot SMUs (MPSMUs

and/or HRSMUs); and it can contain any

combination of dual-slot and single-slot

SMUs between these two extremes.

Only one single-slot MFCMU can be

installed per B1500A mainframe. Up to five

single-slot HV-SPGUs can be installed per

mainframe. Up to five single-slot WGFMUs

can be installed per mainframe.

When one or more WGFMU modules are

installed in the B1500A mainframe, the

following table applies. Multiply the values

given below by the number of installed

modules of that type and add the products

together. The sum of the products must be

less than or equal to 59 for the configura-

tion to be permissible.

MPSMU

2

HRSMU

2

HPSMU

14

MFCMU

7

HV-SPGU

12

WGFMU

10

Maximum voltage between common

and ground

≤ ±42 V

Ground unit (GNDU) specification

The GNDU is furnished standard with the

B1500A mainframe.

Output voltage: 0 V ±100 µV

Maximum sink current: ±4.2 A

Output terminal/connection:

Triaxial connector, Kelvin (remote sensing)

GNDU supplemental information

Load capacitance: 1 µF

Cable resistance:

For I

For 1.6 A < I

For 2.0 A < I

For all cases: sense line R ≤ 10 Ω

Where I

the GNDU.

MPSMU and HRSMU module specifications

Voltage range, resolution, and accuracy (high resolution ADC)

Voltage range

Force resolution

Measure resolution

Force accuracy¹

Measure accuracy¹

Maximum current

±0.5 V

25 µV

0.5 µV

±(0.018 % + 150 µV)

±(0.01 % + 120 µV)

100 mA

±2 V

100 µV

2 µV

±(0.018 % + 400 µV)

±(0.01 % + 140 µV)

100 mA

±5 V

250 µV

5 µV

±(0.018 % + 750 µV)

±(0.009 % + 250 µV)

100 mA

±20 V

1 mV

20 µV

±(0.018 % + 3 mV)

±(0.009 % + 900 µV)

100 mA

±40 V

2 mV

40 µV

±(0.018 % + 6 mV)

±(0.01 % + 1 mV)

²

±100 V

5 mV

100 µV

±(0.018 % + 15 mV)

±(0.012 % + 2.5 mV)

²

1. ± (% of read value + offset voltage V)

2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in Volts.

Current range, resolution, and accuracy (high resolution ADC)

SMU type

Current

range

Force

resolution

Measure

Force accuracy³

Measure accuracy³

Maximum

voltage

HRSMU w/ ASU

±1 pA

1 fA

100 aA

±(0.9 %+15 fA)

±(0.9 %+12 fA)

100 V

HRSMU

±10 pA

5 fA

400 aA (with ASU)

1 fA (HRSMU)

±(0.46 %+30 fA+10 aA x Vo)

±(0.46 %+15 fA+10 aA x Vo)

100 V

±100 pA

5 fA

500 aA (with ASU)

2 fA (HRSMU)

±(0.3 %+100 fA+100 aA x Vo) ±(0.3 %+30 fA+100 aA x Vo)

100 V

MPSMU

±1 nA

50 fA

10 fA

±(0.1 %+300 fA+1 fA x Vo)

±(0.1 %+200 fA+1 fA x Vo)

100 V

±10 nA

500 fA

10 fA

±(0.1 %+3 pA+10 fA x Vo)

±(0.1 %+1 pA+10 fA x Vo)

100 V

±100 nA

5 pA

100 fA

±(0.05 %+30 pA+100 fA x Vo) ±(0.05 %+20 pA+100 fA x Vo)

100 V

±1 µA

50 pA

1 pA

±(0.05 %+300 pA+1 pA x Vo)

±(0.05 %+100 pA+1 pA x Vo)

100 V

±10 µA

500 pA

10 pA

±(0.05 %+3 nA+10 pA x Vo)

±(0.04 %+2 nA+10 pA x Vo)

100 V

±100 µA

5 nA

100 pA

±(0.035 %+15 nA+100 pA x Vo) ±(0.03 %+3 nA+100 pA x Vo)

100 V

±1 mA

50 nA

1 nA

±(0.04 %+150 nA+1 nA x Vo)

±(0.03 %+60 nA+1 nA x Vo)

100 V

±10 mA

500 nA

10 nA

±(0.04 %+1.5 µA+10 nA x Vo) ±(0.03 %+200 nA+10 nA x Vo)

100 V

±100 mA

5 µA

100 nA

±(0.045 %+15 µA+100 nA x Vo) ±(0.04 %+6 µA+100 nA x Vo)

4

1. Specified measurement resolution is limited by fundamental noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits.

2. Measurements made in the lower ranges can be greatly impacted by vibrations and shocks. These specifications assume an environment free of

these factors.

3. ± (% of read value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo))

4. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in Amps.