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B1525A Datasheet(PDF) 9 Page - Agilent(Hewlett-Packard)

Part # B1525A
Description  Agilent B1500A Semiconductor Device Analyzer
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Manufacturer  HP [Agilent(Hewlett-Packard)]
Direct Link  http://www.home.agilent.com
Logo HP - Agilent(Hewlett-Packard)

B1525A Datasheet(HTML) 9 Page - Agilent(Hewlett-Packard)

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8
Measurement functions
Measurement parameters:
Cp-G, Cp-D, Cp-Q, Cp-Rp, Cs-Rs, Cs-D,
Cs-Q, Lp-G, Lp-D, Lp-Q, Lp-Rp, Ls-Rs,
Ls-D, Ls-Q, R-X, G-B, Z-θ, Y-θ
Ranging:
Auto and fixed
Measurement terminal:
Four-terminal pair configuration, four
BNC (female) connectors
Cable length:
1.5 m or 3 m, automatic identification of
accessories
Test signal
Frequency:
Range: 1 kHz to 5 MHz
Resolution: 1 mHz (minimum)
Accuracy: ±0.008 %
Output signal level:
Range: 10 mV
rms to 250 mVrms
Resolution: 1 mV
rms
Accuracy:
±(10.0 % + 1 mV
rms)
at the measurement port of the MFCMU
±(15.0 % + 1 mV
rms)
at the measurement port of the MFCMU
cable (1.5 m or 3.0 m)
Output impedance: 50 Ω, typical
Signal level monitor:
Range: 10 mV
rms to 250 mVrms
Accuracy (open load):
±(10.0 % of reading + 1 mV
rms)
at the measurement port of the MFCMU
±(15.0 % of reading + 1 mV
rms)
at the measurement port of the MFCMU
cable (1.5 m or 3 m)
DC bias function
DC bias:
Range: 0 to ±25 V
Resolution: 1 mV
Accuracy: ±(0.5 % + 5.0 mV) at the
measurement port of the MFCMU or the
MFCMU cable (1.5 m or 3.0 m)
Maximum DC bias current
(supplemental information)
Impedance range
Maximum DC
bias current
50 Ω
10 mA
100 Ω
10 mA
300 Ω
10 mA
1 kΩ
1 mA
3 kΩ
1 mA
10 kΩ
100 µA
30 kΩ
100 µA
100 kΩ
10 µA
300 kΩ
10 µA
Output impedance: 50 Ω, typical
DC bias monitor:
Range: 0 to ±25 V
Accuracy (open load):
±(0.2 % of reading + 10.0 mV) at the
measurement port of the MFCMU or the
MFCMU cable (1.5 m or 3.0 m)
Sweep characteristics
Available sweep parameters:
Oscillator level, DC bias voltage,
frequency
Sweep type: linear, log
Sweep mode: single, double
Sweep direction: up, down
Number of measurement points:
Maximum 1001 points
Measurement accuracy
The following parameters are used to
express the impedance measurement
accuracy at the measurement port of
the MFCMU or the MFCMU cable
(1.5 m or 3.0 m).
Z
X: Impedance measurement value (Ω)
D
X: Measurement value of D
E = E
P’ + (ZS’/|ZX| + YO’|ZX|) x 100 (%)
E
P’ = EPL + EPOSC + EP (%)
Y
O’ = YOL + YOSC + YO (S)
Z
S’ = ZSL + ZOSC + ZS (Ω)
|Z| accuracy
±E (%)
θ accuracy
±E/100 (rad)
C accuracy
at D
X ≤ 0.1
±E (%)
at D
X > 0.1
±E x √¯¯¯¯¯¯¯
(1 + D
X
2) (%)
D accuracy
at D
X ≤ 0.1
±E/100
at D
X > 0.1
±E x (1 + D
X)/100
G accuracy
at D
X ≤ 0.1
±E/ D
X (%)
at D
X > 0.1
±E x √¯¯¯¯¯¯¯
(1 + D
X
2) /D
X (%)
Note: measurement accuracy is specified
under the following conditions:
Temperature: 23 °C ±5 °C
Integration time: 1 PLC or 16 PLC
MFCMU (multi frequency capacitance measurement unit) module specifications


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