MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

© Motorola, Inc. 2004

Order number: MPX5100/D

Rev 9, 3/2004

Integrated Silicon Pressure Sensor

On-Chip Signal Conditioned,

Temperature Compensated

and Calibrated

The MPX5100/MPXV5100 series piezoresistive transducer is a state-of-

the-art monolithic silicon pressure sensor designed for a wide range of appli-

cations, but particularly those employing a microcontroller or microprocessor

with A/D inputs. This patented, single element transducer combines advanced

micromachining techniques, thin-film metallization, and bipolar processing to

provide an accurate, high level analog output signal that is proportional to the

applied pressure.

Features

• 2.5% Maximum Error over 0

° to 85°C

• Ideally suited for Microprocessor or Microcontroller-Based

Systems

• Patented Silicon Shear Stress Strain Gauge

• Available in Absolute, Differential and Gauge Configurations

• Ideal for Automotive and Non-Automotive Applications

Figure 1. Fully Integrated Pressure Sensor Schematic

SENSING

ELEMENT

GND

GAIN STAGE #2

AND

GROUND

REFERENCE

SHIFT CIRCUITRY

PINS 1 AND 5 THROUGH 8 ARE NO CONNECTS

FOR SMALL OUTLINE PACKAGE

PINS 4, 5, AND 6 ARE NO CONNECTS FOR

UNIBODY PACKAGE

THIN FILM

TEMPERATURE

COMPENSATION

AND

GAIN STAGE #1

INTEGRATED PRESSURE SENSOR

Differential

0 to 100 kPa (0 to 14.5 psi)

Absolute

15 to 115 kPa (2.18 to 16.68 psi)

0.2 to 4.7 Volts Output

MPX5100/MPXV5100

SERIES

PIN NUMBER

1

N/C

5

N/C

2

6

N/C

3

GND

7

N/C

4

8

N/C

NOTE: Pins 1, 5, 6, 7, and

8 are internal device

connections. Do not

connect to external

circuitry or ground. Pin1 is

noted by the notch in the

lead.

MPX5100D

CASE 867

MPX5100DP

CASE 867C

MPX5100GSX

CASE 867F

MPXV5100GC6U

CASE 482A

MPXV5100GC7U

CASE 482C

UNIBODY PACKAGE

SMALL OUTLINE

PACKAGE

PIN NUMBER

1

4

N/C

2

GND

5

N/C

3

6

N/C

NOTE: Pins 4, 5, and 6

are internal device

connections. Do not

connect to external

circuitry or ground. Pin1 is

noted by the notch in the

lead.

Freescale Semiconductor, Inc.

For More Information On This Product,

Go to: www.freescale.com