OVERVIEW

BRIGHTNESS DISTRIBUTION

APPLICATIONS

GSemiconductor inspection

GFilm thickness measurement

GElectrostatic remover

GSpectrophotometry

GEnvironmental measurement

GOptical component inspection

FEATURES

H2D2 LIGHT SOURCE UNIT

L11798/-01, L11799/-01

VUV

LIGHT

SOURCE

TLS B0007EC

DISTANCE FROM APERTURE CENTER (mm)

-2.5

-2

-1.5

-1

-0.5

0

0.5

1

1.5

2

2.5

0

50

100

150

200

250

300

350

400

450

500

550

600

650

High

brightness

×6

High

brightness

×6

H2D2 lamp

Conventional model

X2D2 lamp

L2D2 lamp ( 0.5 mm)

Left: Light source, Right: Power supply

TLSZF0047

The H2D2 light source unit contains a high-brightness,

high-end deuterium lamp (H2D2 lamp) that emits light

at a brightness 6 times higher than our current deuteri-

um lamps (L2D2 lamps). Despite its high brightness,

the H2D2 is highly stable, has a long service life, and

allows air-cooled operation by a specially designed

housing. This feature makes it much more convenient

and easy to use than ordinary water-cooled lamps.

The H2D2 can be used in various applications and en-

hances equipment sensitivity and throughput.

GHigh brightness: 6 times

(compared to conventional model)

GHigh stability: Fluctuation 0.05 %p-p (Max.)

Drift

±0.3 %h (Max.)

GLong Life: Warranty of 1000 hours

GAir cooling (needs no cooling water)

GExternal control

GReplaceable lamp