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LPS001WP Datasheet(PDF) 10 Page - STMicroelectronics |
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LPS001WP Datasheet(HTML) 10 Page - STMicroelectronics |
10 / 30 page Functionality LPS001WP 10/30 Doc ID 18171 Rev 1 4 Functionality The LPS001WP is a high-resolution, digital-output pressure sensor packaged in an LGA holed package. The complete device includes a sensing element based on a piezoresistive Whetstone bridge approach, and an IC interface capable of providing information from the sensing element to external applications as a digital signal. 4.1 Sensing element An ST proprietary process is used to obtain a mono-silicon µ-sized membrane for MEMS pressure sensors, without requiring substrate-to-substrate bonding. When pressure is applied, membrane deflection induces an imbalance in the Wheatstone bridge piezoresistors, whose output signal is converted by the IC interface. Intrinsic mechanical stoppers prevent breakage in case of pressure overstress, ensuring measurement repeatability. The pressure inside the buried cavity under the membrane is constant and controlled by process parameters. To be compatible with traditional packaging technologies, a silicon holed cap is placed on top of the sensing element. During the moulding phase, this opening is covered by dedicated protection to avoid membrane blocking. The package design leaves the holed cap exposed, allowing ambient pressure to reach the sensing element. 4.2 IC interface The complete measurement chain consists of a low-noise capacitive amplifier, which converts the resistive unbalance of the MEMS sensor into an analog voltage signal, and of an analog-to-digital converter, which translates the produced signal into a digital bitstream. The converter is coupled with a dedicated reconstruction filter which removes the high frequency components of the quantization noise and provides low rate and high resolution digital words. The pressure data can be accessed through an I2C/SPI interface, making the device particularly suitable for direct interfacing with a microcontroller. 4.3 Factory calibration The IC interface is factory-calibrated at two temperatures and two pressure levels for sensitivity and accuracy. The trimming values are stored inside the device using a non-volatile structure. Each time the device is turned on, the trimming parameters are downloaded into the registers to be employed during normal operation. This allows the user to employ the device without requiring further calibration. Obsolete Product(s) - Obsolete Product(s) |
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