MEMSIC MXR9150G/M Rev.D

Page 3 of 8

ABSOLUTE MAXIMUM RATINGS*

………………...-0.5 to +7.0V

Storage Temperature ……….…………-65

°C to +150°C

Acceleration ……………………………………..50,000 g

*Stresses above those listed under Absolute Maximum Ratings may cause permanent

damage to the device. This is a stress rating only; the functional operation of the

device at these or any other conditions above those indicated in the operational

sections of this specification is not implied. Exposure to absolute maximum rating

conditions for extended periods may affect device reliability.

Pin Description: LCC-16 Package

Pin

Name

Description

I/O

1

NC

Do Not Connect

NC

2

Zout

Z Channel Output

O

3

VSA2

Connect to Ground

I

4

VDD1

2.7V to 3.6V

I

5

DI1

Power Down Pin

I

6

SCK1

Connect to Ground

I

7

NC

Do Not Connect

NC

8

VSA1

Connect to Ground

I

9

NC

Do Not Connect

NC

10

NC

Do Not Connect

NC

11

VDD2

2.7V to 3.6V

I

12

Yout

Y Channel Output

O

13

Xout

X Channel Output

O

14

VDD3

2.7V to 3.6V

I

15

SCK2

Connect to Ground

I

16

DI2

Power Down Pin

I

Ordering Guide

Model

Temperature

Range

Package

MXR9150GZ

0 to 70

°C

LCC16,

RoHS compliant

MXR9150MZ

-40 to 85

°C

LCC16,

RoHS compliant

All parts are shipped in tape and reel packaging.

THEORY OF OPERATION

The MEMSIC device is a complete tri-axis acceleration

measurement system in a single package fabricated on

CMOS IC process. The device operation is based on heat

transfer by natural convection and operates like other

accelerometers having a proof mass except it is a gas in

MEMSIC sensor.

Heat source, centered in the silicon chip is suspended

across a cavity. Equally spaced aluminum/polysilicon

thermopiles (groups of thermocouples) are located

equidistantly on all four sides of the heat source. Under

zero acceleration, a temperature gradient is symmetrical

about the heat source, so that the temperature is the same at

all four thermopiles, causing them to output the same

voltage.

Acceleration in any direction will disturb the temperature

profile, due to free convection heat transfer, causing it to be

asymmetrical. The temperature, and hence voltage output

of the four thermopiles will then be different. The

differential voltage at the thermopile outputs is directly

proportional to the acceleration. Please visit the MEMSIC

website at www.memsic.com for a picture/graphic

description of the free convection heat transfer principle.

+X

+Z

+X

+Y

+Z

13

14

15

16

1

2

5

6

7

8

9

10

11

12

4

3

(Top View)

(Side View)