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LPS331AP Datasheet(PDF) 8 Page - STMicroelectronics |
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LPS331AP Datasheet(HTML) 8 Page - STMicroelectronics |
8 / 36 page Functionality LPS331AP 8/36 Doc ID 022112 Rev 7 3 Functionality The LPS331AP is a high resolution, digital output pressure sensor packaged in an HCLGA holed package. The complete device includes a sensing element based on a piezoresistive Wheatstone bridge approach, and an IC interface able to take the information from the sensing element to the external world, as a digital signal. 3.1 Sensing element An ST proprietary process is used to obtain a mono-silicon µ-sized membrane for MEMS pressure sensors, without requiring substrate to substrate bonding. When pressure is applied, the membrane deflection induces an imbalance in the Wheatstone bridge piezoresistances, whose output signal is converted by the IC interface. Intrinsic mechanical stoppers prevent breakage in case of pressure overstress, ensuring measurement repeatability. The pressure inside the buried cavity under the membrane is constant and controlled by process parameters. 3.2 IC interface The complete measurement chain consists of a low-noise capacitive amplifier, which converts the resistive unbalance of the MEMS sensor into an analog voltage signal, and of an analog-to-digital converter, which translates the produced signal into a digital bitstream. The converter is coupled with a dedicated reconstruction filter which removes the high frequency components of the quantization noise and provides low rate and high resolution digital words. The pressure data can be accessed through an I2C/SPI interface making the device particularly suitable for direct interfacing with a microcontroller. 3.3 Factory calibration The IC interface is factory calibrated at three temperatures and two pressures for sensitivity and accuracy. The trimming values are stored inside the device by a non-volatile structure. Whenever the device is turned on, the trimming parameters are downloaded into the registers to be employed during normal operation. This allows the user to employ the device without requiring any further calibration. |
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