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TALP1000B Datasheet(PDF) 3 Page - Texas Instruments

Part # TALP1000B
Description  Dual-Axis Analog MEMS Pointing Mirror
Download  6 Pages
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Manufacturer  TI1 [Texas Instruments]
Direct Link  http://www.ti.com
Logo TI1 - Texas Instruments

TALP1000B Datasheet(HTML) 3 Page - Texas Instruments

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rms =
y
+ y
+ . . . + y
1
2
N
2
2
2
N
½
TALP1000B
www.ti.com ..................................................................................................................................... SLBS006A – NOVEMBER 2004 – REVISED SEPTEMBER 2009
ELECTRO/MECHANICAL CHARACTERISTICS
over operating supply voltage and operating temperature ranges (unless otherwise noted)
PARAMETER
TEST CONDITIONS
MIN
TYP
MAX
UNIT
VCC Supply voltage
Typical power supply rejection of position sensor
4.8
5.2
V
detectors is >50 dB, 20 kHz to 50 kHz.
Power dissipation
At maximum angle for both axes, includes position
700
feedback and coil drive. 0.65 to 10 micron wavelength
mW
range
Mechanical rotation
Applies to both axes, each axis independent, angle
relative to plane determined by mirror-side mounting
0
±5
deg
positions, over the entire temperature range.
Mirror resonance
Measured at 25°C and 0 degree rotation
112
152
Hz
frequency
Gimbals resonance
Measured at 25°C and 0 degree rotation
100
140
Hz
frequency
Resonance frequency
variation over operating
10
Hz
temperature range
Resonance frequency
variation over rotation
8
Hz
range–each axis
Mirror mechanical Q
Measured by fitting exponential decay after removing
100
2-mA current pulse. Quiescent angle, 25°C
Coil current at maximum
Over the entire temperature range
20
65
mA
rotation
Mirror drift at constant coil
Mirror position is stable to within 5% of full angular
current
range (0.5°) over time and operating temperature
5%
range.
Coil drive linearity
Difference between a mirror angle at a given current,
and the angle predicted by a linear fit to angle versus
0.4
deg
current over the range of ±5 degrees at 25°C
Coil resistance: each axis
Measured at 25°C, coils use copper wire with
variation over temperature given by R = R0[1 + a(T –
61
71
T0)], where, a = 3.9 × 10–3/°C
Quiescent angle: mirror
Angle relative to plane determined by mirror-side
±0.3
deg
side
mounting positions, over the entire temperature range
Quiescent angle: coil side
Angle relative to plane determined by coil-side
±0.5
deg
mounting positions, over the entire temperature range
Mirror crosstalk
Off-axis rotation induced by on-axis actuation relative
5%
to axes determined by mirror mounting positions
Mirror curvature radius
Over the entire temperature range
5
m
Mirror reflectivity
Over the entire temperature range
95%
Displacement of optical
surface from axis of
65
μm
rotation
Mirror surface roughness
Measured over a 0.5 mm square window.
200
nm
Where yx are the height elements along the profile
and N is the number of discrete elements.
Particulates
3 dig surface quality. The diameter of the maximum
sized particle on the mirror must not exceed 30
μmm
(corresponding to 3 dig surface quality). The sum of
the diameters of all particles on the mirror must not
exceed twice this size. Two particles must not be
closer than 200
μm. Particles less than 5 μm are
ignored.(1)
(1)
The diameter of an irregularly shaped particle is the average of its length and width.
Copyright © 2004–2009, Texas Instruments Incorporated
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Product Folder Link(s): TALP1000B
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