24

MEMS Airflow Sensor

D6F-10A, -20A, -50A

Characteristics

* Contact Omron for other thread types (A6)

** Contact Omron for other gases.

Operating Characteristics

D6F-10A

D6F-20A

D6F-50A

Model

D6F-10A

@-000

D6F-20A

@-000

D6F-50A

@-000

Flow rate @ 0

°C and 101.3 kPa

0-10 L/min

0-20 L/min

0-50 L/min

Joint type*

Manifold mount with ‘O’ Ring (A5 type) or Rc 1/4 (1/4” BSPT threaded)(A6 type)**

Case material

Thermoplastic resin

Applicable Gas**

Air

Electrical Connection

Connector (3 wire)

Withstand Pressure (max.)

500 kPa (about 72.5 psi)

Accuracy

±3% F.S. max, 25

°C

Operating Temperature

-10 to +60

°C (with no icing or condensation)

Storage Temperature

-30 to +80

°C (with no icing or condensation)

Operating Humidity

85%RH max. (with no icing or condensation)

Output Signal

1 to 5 VDC, Analog Output (non-linear output)

Current Consumption

15 mA max. (No-Load with V

Insulation Resistance

20M

Ω min. at 500 VDC, between lead terminal and case

Dielectric Strength

500 VAC, 50/60 Hz, for 1 minute. (Leakage current typ <1 mA.), between the lead terminals and the base

Response Time (reference)

150 mS, typical

0.0

2.0

4.0

6.0

8.0

10.0

D6F-10A

Flow rate(L/min)

6.0

5.0

4.0

3.0

2.0

1.0

0.0

D6F-20A

0.0

4.0

8.0

12.0

16.0

20.0

Flow rate(L/min)

6.0

5.0

4.0

3.0

2.0

1.0

0.0

0.0

10.0

20.0

30.0

40.0

50.0

D6F-50A

Flow rate(L/min)

6.0

5.0

4.0

3.0

2.0

1.0

0.0

Flow Rate L/min (normal)

0

246

810

Output Voltage (VDC)

1.00 ±0.12

1.75 ±0.12

2.60 ±0.12

3.45 ±0.12

4.25 ±0.12

5.00 ±0.12

Flow Rate L/min (normal)

0

4812

16

20

Output Voltage (VDC)

1.00 ±0.12

1.93 ±0.12

2.87 ±0.12

3.70 ±0.12

4.41 ±0.12

5.00 ±0.12

Flow Rate L/min (normal)

0

102030

4050

Output Voltage (VDC)

1.00 ±0.12

2.45 ±0.12

3.51 ±0.12

4.20 ±0.12

4.66 ±0.12

5.00 ±0.12