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B58601D8010A025 Datasheet(PDF) 2 Page - EPCOS |
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B58601D8010A025 Datasheet(HTML) 2 Page - EPCOS |
2 / 8 page Pressure sensors C28 series Gauge pressure sensor die for front side pressure applications AS SEN PD 2009-08-03 Please read Cautions and warnings and Page 2 of 8 Important notes at the end of this document. Applications Medical devices Automotive Automation Features Piezoresistive MEMS technology Small dimensions: 2.05 × 2.05 mm Square diaphragm Measured media (front side): Dry non-aggressive gases. Unsuitable for substances which react with glass, silicon or aluminum. Whetstone bridge with mV output, ratiometric to supply voltage Rated pressure ranges 1.6 up to 40 bar Options Temperature sensing diode Delivery mode Tray Dimensional drawings X4 X2 X3 R3 R1 R4 R2 X1 X5 p glass BOROFLOATTM Si 100 allowable edge disruptions 80 µm max. 800 390 allowable edge disruptions 50 µm max. A 150 A B B Note1 Note1: geometry of diaphragm depend on specification X8 X9 electrical diagram: 280 560 840 280 560 X2 850 X1 X5 X3 X10 2050 560 X5 560 X8 X9 X4 X4 700 all dimensions in µm checked bond area (typ. 100µm x 100µm) X1 : Vout+ X2 : VDD– X3 : VDD– X4 : Vout– X5 : VDD+ X8 : Diode (N) X9 : Diode (P) X10: Substrate |
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