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MS79005-A_0.5 Datasheet(PDF) 2 Page - Intersema Sensoric SA

Part # MS79005-A_0.5
Description  PRESSURE SENSOR DIE (0-0.5 BAR)
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Manufacturer  INTERSEMA [Intersema Sensoric SA]
Direct Link  http://www.meas-spec.com/
Logo INTERSEMA - Intersema Sensoric SA

MS79005-A_0.5 Datasheet(HTML) 2 Page - Intersema Sensoric SA

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DA79005_000.doc
May 07, 2009
2/5
000790051447
ECN 1186
BOND PAD CONFIGUTRATION
Vs+/Epi
Out-
Out+
GND1
GND2
MS7901
R5+
R5-
R6+
R6-
Important remarks:
As the sensing elements are diffused resistances, the voltage
applied on the ground pads (GND1 and GND2) has to be lower
than the voltage applied on supply voltage pad (Vs+).
The epitaxial layer is connected to the Vs+ pin under the pad.
Gold ball bonding or aluminium wedge bonding can be used to
wire-bond the sensor. The quality of the wire-bonding is equipment
and
process
dependant.
For
this
reason,
it
is
strongly
recommended that a thorough wire-bonding qualification is made
by the end user if the sensor is going to be operated over an
extended temperature range.
LAYOUT (Absolute sensors)
MS79005-A_0.2
MS79005-A_0.2
Pad opening in passivation is 100 µ
µ
µ
µm


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