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3/5
E / 11722 / A
www.sensortechnics.com
FBA Series
Mass flow sensors for gases
FLOW SPECIFICATIONS
(V
S = 10 ±0.01 V, TA = 25°C)
OUTPUT VS. FLOW CURVES
U
D
0
0
2
M
A
B
FU
D
0
3
0
M
A
B
FU
D
1
0
0
L
A
B
FB
D
1
0
0
L
A
B
F
.
s
s
e
r
P
)
r
a
b
m
(
w
o
l
F
)
m
c
c
s
(
7
.
m
o
N
V
(
C
D )
.
l
o
T
V
±
(
C
D )
.
s
s
e
r
P
)
r
a
b
m
(
w
o
l
F
)
m
c
c
s
(
7
.
m
o
N
V
(
C
D )
.
l
o
T
V
±
(
C
D )
.
s
s
e
r
P
)
r
a
b
m
(
w
o
l
F
)
m
c
c
s
(
7
.
m
o
N
V
(
C
D )
.
l
o
T
V
±
(
C
D )
.
s
s
e
r
P
)
r
a
b
m
(
w
o
l
F
)
m
c
c
s
(
7
.
m
o
N
V
(
C
D )
.
l
o
T
V
±
(
C
D )
9
4
.
0
0
0
2
0
0
.
55
1
.
00
5
.
2
0
3
5
7
.
30
7
.
00
4
.
3
0
0
0
1
0
0
.
55
1
.
09
4
.
3
0
0
0
1
0
0
.
55
1
.
0
2
4
.
0
5
7
1
0
8
.
46
1
.
00
7
.
1
0
2
0
9
.
25
4
.
00
9
.
2
0
0
9
0
9
.
46
1
.
02
4
.
2
0
0
8
2
8
.
48
1
.
0
5
3
.
0
0
5
1
0
5
.
47
1
.
04
8
.
0
0
1
5
9
.
10
2
.
00
4
.
2
0
0
8
0
8
.
47
1
.
09
5
.
1
0
5
6
7
6
.
40
2
.
0
8
2
.
0
5
2
1
7
1
.
48
1
.
02
4
.
0
5
0
5
.
10
1
.
00
0
.
2
0
0
7
6
6
.
48
1
.
03
8
.
0
0
0
4
2
4
.
40
2
.
0
1
2
.
0
0
0
1
5
7
.
39
1
.
04
3
.
0
4
0
4
.
18
0
.
00
6
.
1
0
0
6
2
4
.
49
1
.
01
3
.
0
0
0
2
6
9
.
35
1
.
0
4
1
.
0
5
7
7
2
.
39
1
.
06
2
.
0
3
0
3
.
18
0
.
00
2
.
1
0
0
5
8
1
.
40
2
.
00
0
.
0
0
0
0
.
35
0
.
0
9
0
.
0
0
5
7
6
.
27
1
.
07
1
.
0
2
0
2
.
17
0
.
00
8
.
0
0
0
4
2
8
.
31
2
.
01
3
.
0
-
0
0
2
-
3
0
.
28
1
.
0
4
0
.
0
5
2
0
9
.
13
1
.
08
0
.
0
1
0
1
.
16
0
.
04
5
.
0
0
0
3
1
4
.
39
1
.
09
5
.
1
-
0
0
6
-
5
3
.
15
2
.
0
0
0
.
0
0
0
0
.
15
0
.
00
0
.
0
0
0
0
.
15
0
.
01
3
.
0
0
0
2
6
9
.
27
1
.
02
4
.
2
-
0
0
8
-
5
1
.
10
3
.
0
2
1
.
0
0
0
1
0
3
.
24
1
.
04
4
.
3
-
0
0
0
1
-
0
0
.
15
3
.
0
0
0
.
0
0
0
0
.
10
1
.
0
Note:
7 Devices are calibrated in mass flow. Tolerance values apply to calibration type only.
FBAM200DU
FBAM030DU
FBAL001DU
FBAL001DB
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