COMMERCIAL LASERS

Key Features

• Highest commercially available pulse energy and peak power

• Tighter process control due to superior energy stability

enabled by unique intracavity harmonic generation

• Capable of processing widest range of materials due to wide

range of pulse energies and repetition rates

• High reliability due to low fluence in harmonic crystals and

no cavity optic coatings exposed to UV

• 355 or 532 nm outputs available

The JDSU Q Series lasers lead the market for high-power Q-switched diode-pumped

UV lasers used for a wide variety of micromachining and solar cell processing

applications. Whether for high pulse-energy processing of refractory materials

such as silicon; high repetition rate processing of packaging materials such as

Kapton; or patterning thin-film solar cells, the Q Series lasers deliver unsurpassed

performance combined with industry-leading uptime.

Due to the self-stabilizing characteristics of intracavity UV harmonic generation,

all Q Series lasers exhibit inherently high pulse-to-pulse energy and long-term

output power stability. In addition, the excellent thermal stability of the unique

Nd:YAG-based direct-coupled pump (DCP) architecture maintains exceptionally

stable beam position and profile, which is important for processes requiring

accurate feature placement. These advantages enable Q series lasers to achieve

the tightest possible process tolerances for micromachining and other materials

processing applications.

Applications

• Solar cell processing

• Wafer scribing

• Full-cut thin wafer dicing

• Low-k dielectric grooving

• Micro via drilling

• Micromachining of silicon and metals

High-Power Q-Switched Diode-Pumped UV Laser

Q Series

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