MS7310D datasheet(3/4 Pages) INTERSEMA

Part #	MS7310D

Description	LOW PRESSURE SENSOR DIE (0 to 10 kPa)

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Manufacturer	INTERSEMA [Intersema Sensoric SA]

Direct Link	http://www.meas-spec.com/

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3 / 4 page

DA7310D_004.doc

March 10, 2006

3/

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00007310559

ECN836

FULL SCALE PRESSURE

kPa

bar

mbar

PSI

atm

mm Hg

mm H2O

Inches H2O

10

0.1

100

1.45

0.0987

75.01

1019.7

40.1

ABSOLUTE MAXIMUM RATINGS

Parameter

Symbol

Conditions

Min

Max

Unit

Supply voltage

VS+

Ta = 25 oC

12

V

Storage temperature

TS

-40

+150

oC

Pressure overload

600

kPa

ELECTRICAL CHARACTERISTICS

(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25°C )

Parameter

Min

Typ

Max

Unit

Notes

Operating Pressure Range

0

-

10

kPa

Operating Temperature Range

-40

+125

oC

Bridge Resistance

3000

3800

Ω

Zero Pressure Offset

-40

0

40

mV

Span (Full scale range)

10 kPa

5 kPa

2 kPa

85

43

17

110

55

22

130

65

26

mV

Linearity (Full scale range)

10 kPa

5 kPa

2 kPa

±0.35

±0.25

±0.1

±0.5

±0.4

±0.2

%FS

1

2

3

Temperature Coefficient of Resistance

Span

Offset

+ 2500

- 1600

-80

+ 2900

- 1900

-40

+ 3400

- 2200

0

ppm/°C

µV/°C

4

Pressure hysteresis

-0.1

0.1

% FS

5

Repeatability

-0.1

0.1

% FS

6

Temperature hysteresis

-0.15

0.15

% FS

7

Position sensitivity

0

0.15

% FS

8

Response time

1.0

ms

9

Warm-up time

1

s

10

NOTES

1) Deviation at one half full-scale pressure from least squares best line fit over pressure range 0 to 10 kPa.

2) Deviation at 2.5 kPa from least squares best line fit over pressure range 0 to 5 kPa.

3) Deviation at 1 kPa from least squares best line fit over pressure range 0 to 2 kPa.

4) Slope of the endpoint straight line from 25°C to 60°C.

5) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or

maximum rated pressure, at 25°C.

6) Same as 5) after 10 pressure cycles.

7) Maximum difference in offset after one thermal cycle from -40°C to 125°C.

8) Maximum difference in output at any pressure within the specified pressure range between the sensor being in upright

position and in upside-down position.

9) 10% to 90% signal rise time for a 0 to 10 kPa pressure step change.

10) Time to reach an offset accuracy of 0.2% after switching on a supply voltage of 5V.

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