MPXHZ6130A

Rev 0, 07/2006

Freescale Semiconductor

Technical Data

© Freescale Semiconductor, Inc., 2006. All rights reserved.

Media Resistant and

High Temperature Accuracy

Integrated Silicon Pressure Sensor

for Measuring Absolute Pressure,

On-Chip Signal Conditioned,

Temperature Compensated

and Calibrated

The MPXHZ6130A series sensor integrates on-chip, bipolar op amp circuitry

and thin film resistor networks to provide a high output signal and temperature

compensation. The sensor's packaging has been designed to provide resistance

to high humidity conditions as well as common automotive media. The small form

factor and high reliability of on-chip integration make the Freescale

Semiconductor, Inc. pressure sensor a logical and economical choice for the

system designer.

The MPXHZ6130A series piezoresistive transducer is a state-of-the-art,

monolithic, signal conditioned, silicon pressure sensor. This sensor combines

advanced micromachining techniques, thin film metallization, and bipolar

semiconductor processing to provide an accurate, high level analog output signal

that is proportional to applied pressure.

Figure 1 shows a block diagram of the internal circuitry integrated on a

pressure sensor chip.

Features

•

Resistant to High Humidity and Common Automotive Media

•

Improved Accuracy at High Temperature

•

1.5% Maximum Error over 0

° to 85°C

•

Ideally suited for Microprocessor or Microcontroller-Based Systems

•

Temperature Compensated from -40

° to +125°C

•

Durable Thermoplastic (PPS) Surface Mount Package

Typical Applications

•

Aviation Altimeters

•

Industrial Controls

•

Engine Control/Manifold Absolute Pressure (MAP)

•

Weather Station and Weather Reporting Devices

ORDERING INFORMATION

Device

Type

Options

Case

No.

MPX Series

Order No.

Packing

Options

Device

Marking

SUPER SMALL OUTLINE PACKAGE

Basic

Element

Absolute, Element Only

1317

MPXHZ6130A6U

Rails

MPXHZ6130A

Absolute, Element Only

1317

MPXHZ6130A6T1

Tape & Reel MPXHZ6130A

Ported

Element

Absolute, Axial Port

1317A MPXHZ6130AC6U

Rails

MPXHZ6130A

Absolute, Axial Port

1317A MPXHZ6130AC6T1 Tape & Reel MPXHZ6130A

MPXHZ6130A

SERIES

INTEGRATED

PRESSURE SENSOR

15 TO 130 kPa (2.2 TO 18.9 PSI)

0.2 TO 4.8 V OUTPUT

MPXHZ6130A6U

CASE 1317-04

MPXHZ61630AC6U

CASE 1317A-03

SUPER SMALL OUTLINE PACKAGE

SUPER SMALL OUTLINE PACKAGE

1. Pins 1, 5, 6, 7, and 8 are internal device

connections. Do not connect to external

circuitry or ground. Pin 1 is denoted by the

notch in the lead.

1

N/C

5

N/C

2

6

N/C

3

GND

7

N/C

4

8

N/C