MEMSIC MXD2020G/M/N/H Rev.E
Page 3 of 7
3/25/2005
ABSOLUTE MAXIMUM RATINGS*
Supply Voltage (VDD, VDA) ………………...-0.5 to +7.0V
Storage Temperature ……….…………-65
°C to +150°C
Acceleration ……………………………………..50,000 g
*Stresses above those listed under Absolute Maximum Ratings may cause permanent
damage to the device. This is a stress rating only; the functional operation of the
device at these or any other conditions above those indicated in the operational
sections of this specification is not implied. Exposure to absolute maximum rating
conditions for extended periods may affect device reliability.
Pin Description: LCC-8 Package
Pin
Name
Description
1
TOUT
Temperature (Analog Voltage)
2
DOUTY
Y-Axis Acceleration Digital Signal
3
Gnd
Ground
4
VDA
Analog Supply Voltage
5
DOUTX
X-Axis Acceleration Digital Signal
6
Vref
2.5V Reference
7
Sck
Optional External Clock
8
VDD
Digital Supply Voltage
Ordering Guide
Model
Package Style
Digital
Output
Temperatu
re Range
MXD2020GL
LCC8
RoHS compliant
100 Hz
0 to 70
°C
MXD2020GF
LCC8, Pb-free
100 Hz
0 to 70
°C
MXD2020HL
LCC8
RoHS compliant
400Hz
0 to 70
°C
MXD2020HF
LCC8, Pb-free
400Hz
0 to 70
°C
MXD2020ML
LCC8
RoHS compliant
100 Hz
-40 to 105
°
MXD2020MF
LCC8, Pb-free
100 Hz
-40 to 105
°
MXD2020NL
LCC8
RoHS compliant
400 Hz
-40 to 105
°
MXD2020NF
LCC8, Pb-free
400 Hz
-40 to 105
°
All parts are shipped in tape and reel packaging.
Caution: ESD (electrostatic discharge) sensitive device.
8
4
1
2
3
7
6
5
Top View
X +g
Y +g
Note: The MEMSIC logo’s arrow indicates the +X sensing
direction of the device. The +Y sensing direction is rotated 90°
away from the +X direction following the right-hand rule.
Small
circle indicates pin one(1).
THEORY OF OPERATION
The MEMSIC device is a complete dual-axis acceleration
measurement system fabricated on a monolithic CMOS IC
process. The device operation is based on heat transfer by
natural convection and operates like other accelerometers
having a proof mass. The proof mass in the MEMSIC
sensor is a gas.
A single heat source, centered in the silicon chip is
suspended across a cavity. Equally spaced
aluminum/polysilicon thermopiles (groups of
thermocouples) are located equidistantly on all four sides of
the heat source (dual axis). Under zero acceleration, a
temperature gradient is symmetrical about the heat source,
so that the temperature is the same at all four thermopiles,
causing them to output the same voltage.
Acceleration in any direction will disturb the temperature
profile, due to free convection heat transfer, causing it to be
asymmetrical. The temperature, and hence voltage output
of the four thermopiles will then be different. The
differential voltage at the thermopile outputs is directly
proportional to the acceleration. There are two identical
acceleration signal paths on the accelerometer, one to
measure acceleration in the x-axis and one to measure
acceleration in the y-axis. Please visit the MEMSIC
website at www.memsic.com for a picture/graphic
description of the free convection heat transfer principle.
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